Used EATON NOVA / AXCELIS (Ion Implanters & Monitors) for sale

Ion implantation is a key process in the semiconductor industry used to introduce impurities into silicon wafers to modify their electrical properties. EATON NOVA/AXCELIS is a reputable manufacturer known for their advanced ion implanters and monitors. Their ion implanters, such as the NV GSD-HE, NV 10-160, and NV 10-80, are designed to provide precise and controlled implantation of ions into the wafer. These systems offer numerous advantages, including high throughput, improved process control, and excellent uniformity. They are suitable for a wide range of applications, including logic, memory, and power devices. The NV GSD-HE is an analog of hybrid implanters and offers enhanced energy performance, allowing for increased flexibility and productivity. The NV 10-160 is designed to facilitate implantation for challenging devices, providing ultra-low energy capabilities and excellent dose control. On the other hand, the NV 10-80 is a high-energy implanter that delivers high dose performance and superior uniformity. EATON NOVA/AXCELIS implanters are equipped with advanced monitoring systems that ensure precise control and real-time feedback during the implantation process. These monitors provide accurate measurements of beam current, dose, energy, and other relevant parameters, allowing for precise process control and optimization. Overall, EATON NOVA/AXCELIS ion implanters and monitors are renowned for their high performance, versatility, and reliability, making them a preferred choice in the semiconductor industry.

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