Diffusion Furnaces & Accessories

Nitride/Ar poly LPCVD dual thermal vertical furnace, 12" (2) Load ports Side 1: Configured for pCVD TiN deposition Side 2: Configured for As doped Poly HiK Mainframe: MSC3 maintenance screen Genmark GB4S back end robot 28 FOUP carousel capacity Does not include: Pumps or abatement Process chemical cabinet Quartz/tubes 2007 vintage.

Vertical LPCVD furnace Dual reactor.

Vertical furnaces, 12" Dual reactors cure VDF: CU, PI WIP Module: Part number / Description 2945169-01 / Main frame WIP assembly 2379589-01 / Elevator chr 2947641-01 / Cassette stacker carousel 2944170-01 / Cassette transfer module 2947692-01 / Load port 2403641-01 / Pneumatic box 2947617-01 / WIP Flow box Reactor module (Base model info): Part number / Description 2330865-01 / Main reactor A412 frame assembly 2916177-01 / Reactor A412 top frame 2931303-01 / Reactor servo drive 2370387-01 / Reactor EMO / Motion 2931257-01 / BTC Box 2373718-01 / WTC Box 2909251-01 / R1 / R2 Controllers 2936550-01 / Reactor touchscreen 2327287-01 / Carousel bearing 2329999-01 / Carousel housing 2931222-01 / Carousel drive 2931109-01 / Reactor carousel 2379872-01 / Reactor fan 2936739-01 / A412 Gate valve 2997320-01 / Boat elevator A412 2972786-01 / Loader arm LP ROT 2936666-01 / O2 Analyzer reactor GEN 2366460-01 / N2 Purge generic 2330768-01 / TCU / TCF Generic 2330350-01 / VAC / PNEU Comp A412 Miscellaneous: Part number / Description 2895587-01 / (2) End effectors 242 CER 2927772-01 / N2-Purge 200 SLM assembly 2927810-02 / Reactor O2 analyzer 120 VAC 2405067-01 / Door opener 2nd GEN IC 2888025-01 / Transponder 2356341-01 / Press sens WHR single 2356333-01 / Press sens RC car Reactor chambers 1-2: Part number / Description 2995905-01 / Reduced exhaust ATM kit 2842939-02 / Process tube ATM NQ thin kit 2897334-02 / Door plate ATM LT H2 SS 2845644-02 / Wafer carrier NQ ATM 300 mm 2805847-01 / Thermocouples ATM BC 2954664-01 / Mount block FLG'S 2869764-01 / FLGS Proc / Door ATM MK 2806096-01 / ATM Scavenger purge 2864282-02 / Outlet no QTZ ATM H2-cure kit 2894564-01 / Heat exchanger RC1 / RC2 2996235-01 / Klixon heater element 2953927-01 / Heat ELEM ATM FR LT 2836343-01 / ATM Exhaust RC1 / RC2 120 V 2301652-01 / ELEC FLG'S ATM A412 2866048-01 / Heater outlet ATM 24 V 2955644-01 / GASP H2 Cure RC 1/2 2907860-01 / Intermediate H2 Cure RC 1/2 2310953-02 / INC GASL RC 1/2 901300 2865262-01 / H2 Sensing RC1 / RC2 2332108-01 / Pump TCU 2862255-01 / O2-Analyzer ATM H2 cure RC 1/2.

Vertical LPCVD furnace.

CVD System, 12" 2011 vintage.

LPCVD furnace.

LPCVD stack furnace, 4" (4) Tubes No pumps 7351 controllers De-installed.

Stack oxidation CVD furnace, 6" Garden variety (2) Tube PolySi CVD (2) Tube LPCVD 1992-1993 Vintage.

Burn-wet system.

2009 vintage.

Fast firing furnaces Venturi nozzle FF Heating cassette Cooling cassette Power control Process control system Operating panel Exhaust air condenser (top mount) Condensate tank Main Parts:
Conveyor Belt Tightener Drive Unit
Rollers
Conveyor Belt Cleaner
Ultrasonic Cleaner (U-Cleaner)
Brush Cleaner 2011 vintage.

Diffusion furnace.

Diffusion furnace JR Loader & unloader.

CVD Furnaces Process: MOT / Si3N4 / Poly TM Module EFEM Module (4) PM Modules MCR MPB (2) Heater ASSY (2) Screws (8) Power Adaptor (8) Lift Pin (6) Top plate (2) Inner Plate Pendant (4) Cable (14) Pump Signal Interface (4) Steal Pad.

Furnace, 6" Process: Wet oxidation Main frame Utility box.

Diffusion furnace, 6" Process: Pyro.

Vertical diffusion furnace Flat zone aligner with sensor Wafer counter: M-826 Main controller: Dual hard disk CX-3002B Exhaust controller: PCU- 3000 PLC Unit: OMRON (CX-1314) (2) Hard gas pattern GFC panels (2) Software pattern GFC panels Heater torch: UV Sensor (2) Torch type Gas unit: P-N2-1 0.30MPa / 30L/min 1 ¼” UJR P-N2-2 0.30MPa / 100L/min 1 ¼” UJR O2 0.20MPa / 21L/min 1 ¼” UJR H2 0.20MPa / 20L/min 1 ¼” UJR HCL 0.20MPa / 20L/min 1 ¼” UJR Air/N2 0.6MPa 1 ¼” UJR Power: Heater: 1Φ208V, 50KVA Control: 1Φ208V, 9KVA 2000 vintage.

Diffusion furnace, 6" 1990 vintage.

CVD System, 8" DASI / Doped a-Si, N2, SiH4, Si2H6 1996 vintage.

Furnace, 8" Process: SiON Parts missing.