Diffusion Furnaces & Accessories

Vertical diffusion furnace / LPCVD / Poly CVD furnace, 8" Process applications: Dry-Ox, Wet-Ox, NO(N2O)-Anneal, Well Diffusion, N2(Ar, H2)-Anneal, PH3-Anneal, Doped/Undoped-Poly-Si, Doped/Undoped-SiGe-Poly, Si3N4, TEOS, HTO Accommodates: 5 wafers simultaneously Automatic filler dummy wafer supply by wafer detection mechanism SEMI standard compliant I/O stage Supports SMIF interface GUI tube controller (CX3000 series) SECS / GEM compatibility 1999 vintage.

Control console for POLYFLOW quartz tube cleaner.

LPCVD stack furnace, 4" (4) Tubes No pumps 7351 controllers De-installed.

Vacuum furnace 12" x 12" x 20" deep work area 2400°F maximum temperature, Moly Hot Zones Diffusion pumped Cooling fan Honeywell controls.

Nitride Furnace.

Furnace, 8" Configured for vacuum annealing of metals Plumbed for nitrogen, hydrogen, and forming gas Equipped with TS-4000Z controller and Ebara A70W vacuum pump 1996 vintage.

Stack oxidation CVD furnace, 6" Garden variety (2) Tube PolySi CVD (2) Tube LPCVD 1992-1993 Vintage.

Diffusion Furnaces.

Stack Furnace, 4" 6" - 7" Bore 208v 3 ph 60hz 45 KW 126 amps.

Atomic Layer Deposition system, 12" ALD: SiN 2008 vintage.

Green tape firing furnace With Delta F oxygen analyzer 8" Wide belt 107" Long hot zone (12) Zones LTCC 1997 vintage.

oxidation furnace, 8", as is, 1996 vintage.

furnace. Its a 8" tool with 10" tunnels. Was only run for 2 days. Has been warehoused for 3 years.

LPHTO vertical furnaces.

Tube furnace, 8" Bench top.

L/L nitride furnace, 8" 1998 vintage.

Pyro (N2O) furnace, 8" 1995 vintage.

Tube furnace Mini Max diffusion furnace tabletop system Microprocessor based digital programmable controllers for each zone Operating Temp. Range: 200°C to 1200°C Inside Dimensions: 6" dia. x 32" L 240V, 3 Ph, 50/60 Hz.

HTO furnaces, 8" 1995 vintage.

Fast firing furnaces Venturi nozzle FF Heating cassette Cooling cassette Power control Process control system Operating panel Exhaust air condenser (top mount) Condensate tank Main Parts:
Conveyor Belt Tightener Drive Unit
Rollers
Conveyor Belt Cleaner
Ultrasonic Cleaner (U-Cleaner)
Brush Cleaner 2011 vintage.