Used GASONICS / NOVELLUS (Diffusion Furnaces & Accessories) for sale

GASONICS, which is now a part of NOVELLUS Systems, is a well-known manufacturer of diffusion furnaces and accessories. Diffusion furnaces are essential in the semiconductor industry for processes such as thermal oxidation, annealing, and dopant diffusion. These furnaces are designed to provide precise and controlled conditions necessary for these processes to occur. GASONICS/NOVELLUS offers a range of diffusion furnaces and accessories with various models and specifications. Some popular analogues include the HIPOX 6000, HIPOX, and HIPOX 5025. These models are known for their advanced features and high-performance capabilities. One major advantage of GASONICS/NOVELLUS diffusion furnaces is their excellent temperature control, allowing for precise process repeatability. They also exhibit superior uniformity in terms of both temperature and gas flow distribution across the wafer, ensuring consistent quality in the processed wafers. Another advantage is the user-friendly interface and control system, which allows operators to easily program and monitor the diffusion process parameters. This enhances overall productivity and reduces errors. Some examples of applications using GASONICS/NOVELLUS diffusion furnaces include thermal oxidation to create a thin layer of silicon dioxide on silicon wafers, annealing to repair or modify the electrical properties of the wafer, and dopant diffusion to introduce impurities into the wafer surface. Overall, GASONICS/NOVELLUS diffusion furnaces and associated accessories are renowned for their precision, reliability, and flexibility, making them popular choices in the semiconductor industry.