Used KLA / TENCOR / INSPEX (Mask & Wafer Inspection) for sale

KLA Corporation, formerly known as KLA-Tencor, is a leading manufacturer of advanced process control and yield management solutions for the semiconductor industry. Their INSPEX line of mask and wafer inspection equipment provides comprehensive and reliable solutions for ensuring the quality and integrity of semiconductor masks and wafers. The INSPEX systems from KLA employ advanced optical technologies and algorithms to accurately detect and classify defects on the masks and wafers. These units are equipped with high-resolution imaging capabilities, enabling them to capture detailed images of the samples, analyze the data, and identify any abnormalities or defects. They provide fast and reliable inspection results, helping semiconductor manufacturers enhance their yield and reduce production costs. One of the analogues produced by KLA is the TPC 8520 system. It is designed for high-speed inspection of critical masks used in advanced lithography processes. The TPC 8520 offers excellent defect detection sensitivity, while maintaining low false detection rates, ensuring high inspection quality. Another example is the Eagle system, which is optimized for wafer inspection. The Eagle provides accurate and high-throughput defect detection, capable of detecting various defect types, such as particles, scratches, and pattern deviations. It is suitable for both front-end and back-end semiconductor processes. The EX 3500 is another mask inspection system offered by KLA. It features an advanced deep ultra-violet (DUV) imaging technology that enables precise and reliable defect detection and classification. The EX 3500 is capable of inspecting a wide range of mask types, including binary masks, embedded attenuated phase-shift masks (EAPSM), and alternating-aperture phase-shift masks (Alt-PSM). Overall, KLA's INSPEX mask and wafer inspection machines provide semiconductor manufacturers with cutting-edge solutions that enable them to ensure the quality and reliability of their products, improving yield and reducing production costs.