Used SEMITOOL Storm 300 #9211217 for sale
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SEMITOOL Storm 300 is a box washer in the semiconductor industry. It is designed for advanced processes such as chemical mechanical planarization (CMP) and wet cleaning. Storm 300 utilizes an advanced design and includes features that allow for superior cleanliness, superior process control and higher throughput capacity. SEMITOOL Storm 300 is designed to provide advanced cleaning capability, precision process control and high speed process throughput. Its design promotes superior heat and contaminant control, ensuring a uniform, quality result. Storm 300 utilizes a closed loop, recirculated, hot and cold DIW equipment, with multiple recirculation pumps, and a temperature control system. SEMITOOL Storm 300 has six independently adjustable spray chambers and nine hot and cold rinse tanks, which are independently temperature controlled. It also has integral, fully automatic hot and cold chemical delivery systems, and a unique internal unit for sampling and draining for individual processing tanks. Storm 300 provides superior control of rinse parameters such as water flow, temperature and chemical concentration. SEMITOOL Storm 300 has a multi-zone curing oven, which is designed to quickly heat the parts and provide a cleaner, faster and more reliable drying process. This oven also includes a adjustable air-velocity control machine and a temperature control tool. An internal exhaust asset is also included for evacuating volatile compounds to ensure superior cleanliness. Storm 300 also provides a chamber for a variety of optional wet bench accessories, including a second curing oven and a filter/pump assembly. SEMITOOL Storm 300 is designed with robust safety systems, including door interlock, vacuum sensing and a high-temperature warning model. Storm 300 also has an on-board data logging and control equipment which helps ensure accurate and repeatable process parameters. SEMITOOL Storm 300 is designed to meet the stringent requirements of high volume semiconductor manufacturing, and it offers an advanced, reliable design and superior process control.
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