Used LAM RESEARCH 2080 TCU #9252338 for sale

ID: 9252338
Chiller.
LAM RESEARCH 2080 TCU is a chiller-recirculating heat exchanger designed to provide reliable and efficient heat transfer of liquids used in semiconductor wafer processing. It offers full heat dissipation capability, making it the perfect choice for applications such as lithography, deposition, etch and CMP processes. This unit features a unique two-stage, counterflow condenser/evaporator design, consisting of a stainless steel tube-in-shell heat exchanger with a self-contained refrigerant circuit. The counterflow configuration allows the evaporator to be placed upstream of the condenser to achieve higher efficiency. The high wall heat transfer coefficient also reduces the total heat load requirements, allowing for lower operating temperatures. 2080 TCU also utilizes two non-ferrous motors to optimize thermal transfer between the chiller and the wafer processing fluid. This combination ensures precise and consistent temperature control. The motors are combined with two pumps and a stainless steel venturi to generate the required differential pressure. An adjustable flow controller is also included to regulate the flow rate of the chillers to meet the specific requirements of the application. LAM RESEARCH 2080 TCU is designed to be user-friendly, featuring a standard 5.7 inch touch panel to allow for easy access to control parameters. This panel also display feedback on the system's operation, including temperature, pressure and flow rate information. It also includes communication with other control systems, making it easy to integrate into any existing process. This heat exchanger is designed for use with clean, low- contamination chemicals, ensuring that the wafers remain clean throughout the processing. It also features a low-maintenance design, requiring minimal cleaning and maintenance when operating at peak efficiency. Overall, 2080 TCU is an ideal solution for semiconductor process applications requiring precise and consistent thermal control. Its efficient design, user-friendly interface, and clean operation make it an excellent choice for wafer manufacturers looking to improve their process efficiency.
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