Used ASM A 400 #9015529 for sale

ASM A 400 is a diffusion furnace and associated accessories produced by ASM International. This furnace is designed to provide a high degree of temperature control during thermal processes and provide maximum flexibility in terms of process applications. It is suitable for a wide range of applications includingHeat-Assisted and hydrogen-Assisted chemical vapor deposition (HACVD), Thermal Oxidation, Low Pressure Chemical Vapor Deposition (LPCVD), High Temperature Annular Shutter Annealing (HTASA), and Semiconductor Doping. ASM A400 is composed of main housing, multi-functional power module, and vertical chamber component. The chamber component contains eight columns for atomic force microscopy (AFM) and quartz crystal measurements (QCM). The main unit is an insulated single-piece module held vertically with a single removable top. It includes a single-side digital controller and two easily adjustable switching loops for gas control and cooling. The power module has digital current - voltage - time controllers and two cooling systems, a forced air equipment and a water-cooling system. The vertical chamber includes an optional RF (RF) matching network and either a heating cable or a membrane-latching unit. A-400 also features a series of safety mechanisms, such as a pressure relief machine that maintains a safe pressure level within the furnace, and shut-down and emergency shut-down systems that prevent disaster if high-limit settings are exceeded. The furnace is equipped with a two-step cooling tool that circulates air through the columns and periodically reverses the flow to prevent the formation of hot spots. This ensures uniform distribution of temperatures throughout the furnace. ASM A-400 also has a variety of accessories available for process or user customization. These accessories include annular shutter controllers, for controlling aperature size, shutter speed, temperature and ignition control for HTASA; heating element thermocouples and furnace chamber thermocouples, for monitoring temperatures; and vacuum feedthroughs, for vacuum control. In conclusion, A400 is a powerful, versatile and reliable diffusion furnace and associated accessories. It is capable of delivering precise and steady performance and is suitable for a wide variety of applications in the semiconductor industry. It is equipped with an array of safety mechanisms to maximize user safety and is easy to customize with available accessories.