Used ASM A 412 #293652798 for sale
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ID: 293652798
Wafer Size: 12"
Vintage: 2006
Vertical LPCVD furnaces, 12"
2006 vintage.
ASM A 412 is a robust and reliable diffusion furnace and accessory designed to meet a wide variety of production needs. This diffusion furnace is perfect for single or multiple layer applications up to three devices and wafers, as well as offering ramp up and homogenization capabilities for optimal uniformity and process performance. The equipment is equipped with up to four independent heating zones and powerful convection fan control to ensure rapid temperature ramp up times. It is also equipped with an integrated gas distribution system that is designed to deliver precise gas flows for precise control and uniformity of the diffusion process. With integrated safety features such as over-temperature protection and a knife edge-heated air unit, this diffusion furnace offers advanced diffuse deposition processes with minimized deposition rate variations, minimal substrate deformation, and optimized process uniformity. The machine also includes thermocouple control and an array of process parameters including pressure, vacuum, thermal cycle, and time-based parameters, enabling a high degree of process repeatability and control. The tool also provides a user-friendly, advanced process controller, featuring a simple graphical user interface and easily programmable commands for maximum operational ease. With these features, ASM A412 is the perfect choice for high-quality diffusion processes for coating films and layers from oxides to copper as well as a wide variety of other precision coating applications.
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