Used ASM A 412 #293752528 for sale

ASM A 412 is a diffusion furnace and accessories designed for high-volume manufacture of semiconductor devices. It utilizes an advanced horizontal, forced-air mode for sample loading or unloading. The furnace chamber is Molybdenum coated and can accommodate up to 8 4" wafers, 4 8" wafers, or 4 12" wafers. The chamber also features a fast cool-down mode to capitalize on all available deposition time. The pulse-periodic constant temperature control system offers a maximum temperature of 1,200°C, with an accuracy of ±5°C. This ensures uniform, quality performance. ASM A412 features an oxidation zone, capable of providing an atmosphere of oxygen, argon and nitrogen. This provides superior control of implant species, dopants, and oxides. The system is powered by a 30kW AC product and an array of power supplies for gas boxes and flux boxes. The flux box controlled heated palladium filament, and the mass flow controller helps maintain peak substrate temperatures. A 412 diffusion furnace is capable of various susceptor openings, reducing loading and unloading time. The design helps attain a rapid temperature rate of 10°C/sec. It is suitable for processes where rapid cool down of the wafers is necessary, such as LOCOS and gate oxide formations. The unit is also equipped with a PC-based process controller that stores up to 11 program recipes and up to 40 data logs. The operator has complete control of the process variables, temperatures, pressure and so on. The process controller monitors the entire process through a free oven software. The high temperature insulation includes vacuum bottle insulation and cooling fans that help cool down the furnace chamber quickly with reduced energy consumption. These cooling fans help to reduce the temperature gradient between the cold zone and the hot zone. The high speed lifting arm helps reduce the operation time and increase the throughput. A412 diffusion furnace is ideal for research, development and production applications in semiconductor fabrication labs. It designer offers effective temperature and atmosphere control, together with short cycle times, making it the perfect tool for producing high-quality devices.