Used ASM A 412 #9076841 for sale
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ID: 9076841
Wafer Size: 12"
Vintage: 2007
Nitride/Ar poly LPCVD dual thermal vertical furnace, 12"
(2) Load ports
Side 1: Configured for pCVD TiN deposition
Side 2: Configured for As doped Poly HiK
Mainframe:
MSC3 maintenance screen
Genmark GB4S back end robot
28 FOUP carousel capacity
Does not include:
Pumps or abatement
Process chemical cabinet
Quartz/tubes
2007 vintage.
ASM A 412 is a diffusion furnace and accessories kit designed to enable the manufacture of advanced-grade semiconductor materials. The diffusion furnace consists of an atmosphere-controlled oven chamber that may be heated up to 1300 degrees C. The equipment includes a highly precise gas controller, capable of providing consistent inert gas flow to the furnace to minimize oxygen and moisture levels. The diffusion furnace also includes an airtight vacuum system designed to reduce air exposure and create a high purity atmosphere for application of desired materials. The diffusion furnace also features a solid-state heating element that is designed to minimize energy consumption and protect the unit from drying. Heating elements may be easily adjusted and monitored through the control panel. The panel also features temperature control settings for consistent, accurate diffusion of materials. In addition to the furnace, ASM A412 set includes a selection of accessories to ensure optimal performance. A plasma etcher is included to clean and prepare the chamber for desired applications, while the lamination press ensures uniform diffusion rates and high yield. A vacuum pump is also included for degassing operations, while a lift-lock door mechanism secures the chamber during maintenance. A 412's advanced control panel allows for automated operations and can be programmed to provide optimum temperatures, timings, and spacing for desired applications. In addition, the control panel also features alarms for issues such as overheating, low gas pressure, etc., to ensure safety and reduce potential downtime. The machine's high-performance filter also ensures optimal gas diffusion and turn-down ratios. A412 diffusion furnace and accessories kit is an ideal choice for creating high quality, advanced-grade semiconductor materials that adhere to strict industry and safety standards. With its built-in features and precise control tool, the asset will provide reliable performance and consistent results.
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