used ASM A 412 for sale

ID#: 9076841 Manufacturer: ASM Model: A 412 Category: DIFFUSION FURNACES & ACCESSORIES Vintage: 2007 Wafer Size: 12" Equipment Details: Nitride/Ar poly LPCVD dual thermal vertical furnace, 12"
(2) Load ports

Side 1: Configured for pCVD TiN deposition
Side 2: Configured for As doped Poly HiK

Mainframe:
MSC3 maintenance screen
Genmark GB4S back end robot
28 FOUP carousel capacity

Does not include:
Pumps or abatement
Process chemical cabinet
Quartz/tubes

2007 vintage.
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