Used ASM A 600 UHV #9232052 for sale
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ID: 9232052
Wafer Size: 8"
Vertical furnaces, 8"
Cluster tool controller
Touch screen monitor
Keyboard with trackball
User interface
Operating system: Windows NT
Hardware system:
Cluster platform module
Cluster platform pump module
CTC Computer cabinet
Process module
Process module pump cabinet
Reactor:
Reaction tube
Method: Single tube
Material: High-purity quartz
Heater element:
Heater wire material: Cantor wire, Ø 8 mm
Normal operating temperature: 500°C to 700°C
Maximum temperature: 800°C
Equal heat length: 300 mm
Temperature control: 500°C to 700°C ± 0.50°C
Control circuit: Cascade
Thermocouple:
(4) Zones
Inside: K-Type
Outside: K-Type with ceramic protective tube
Cooling method: Water-cooling, 2 l/min
Wafer boat:
Wafer size: Ø 200 mm
Wafer quantity: 52 Wafer charges
Material: High-purity quartz.
ASM A 600 UHV is a diffusion furnace used for the preparation of ultra-high vacuum (UHV) samples. This equipment consists of a vacuum chamber, a vacuum pumping system, a furnace chamber, an adjustable-height heater, and all necessary controls, power supply, and accessories. The vacuum chamber is designed to provide a base pressure of 5x10-6 Torr, lower base pressures are achievable by bake out of the chamber. The chamber is cylindrical in shape with two slits to access the heater and sample. The two inner stages accommodate the pumping stages, and the outer stages are the heater and sample. The inner stages are rotated by a rotating vent valve allowing easy access to the sample. The valve is open and closed with a manual lever mounted to the chamber that can be rotated 90 degrees in either direction. A high vacuum needle valve is used for fine valve control and accuracy. The vacuum pumping unit includes a cold trap, a rotary pump, a diffusion pump, and a combination of mechanical, oil, cryogenic, and turbo-molecular pumps. The cold trap is used to reduce the partial pressure of the evacuated process gas, which is further reduced by the rotary and diffusion pumps located on the inner chamber. The mechanical pumps provide a high pumping speed and the oil pump, a high ultimate pressure for a given ratio of gas volume displacement. The cryogenic and turbo pumps are connected to the chamber for a deep, ultahigh vacuum. The furnace chamber is further equipped with an adjustable-height heater, used to heat the sample up to 1000 C for diffusion processes, and the in-situ measurements. The adjustable-height heater is set up and controlled via a programmable controller, which also controls external connections and sensors. The controller includes internal multiplexers, which handle more than one electrical device simultaneously. The heating machine is robust and efficient, providing both high and low temperature range in a scalable manner. The entire tool is constructed from stainless steel, with the main chamber having an internal diameter of 600 mm and height of 1500 mm. The chamber includes a viewing window and a vacuum vent for the sample. The entire asset is supplied with a base and clamp arrangement, allowing secure and easy handling of the furnace. A 600 UHV diffusion furnace is a versatile solution for preparing high-vacuum samples and performing a range of diffusion processes. Its adjustable-height heater allows precise control of the sample heating, allowing experimenters to achieve the desired results, while its high-quality construction and robust design ensures long-term reliability.
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