Used ASM A 600 #112365 for sale
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ID: 112365
Wafer Size: 8 "
LPCVD Furnaces
UHV Vertical furnaces
Cluster tool controller
Touch screen monitor
Keyboard with trackball
User interface
Hardware system:
Cluster platform module
Cluster platform pump module
CTC Computer cabinet
Process module
Process module pump cabinet
Reactor:
Reaction tube
Method: Single tube
Material: High-purity quartz
Heater element:
Heater wire material: Cantor wire, Φ 8 mm
Normal operating temperature: 500°C to 700°C
Maximum temperature: 800°C
Equal heat length, 12"
Temperature control: 500°C to 700°C ± 0.50°C
Control circuit: Cascade
Thermocouple:
(4) Zones
Inside: K-Type
Outside: K-Type with ceramic protective tube
Cooling method: Water-cooling 2 l/min
Wafer boat:
Wafer size, Φ 8"
Wafer quantity: 52 Wafer charges
Material: High-purity quartz
Operating system: Windows NT.
ASM A 600 is a diffusion furnace and accessories specifically designed for the deposition of thin films on substrates. It is a high-temperature furnace that is capable of depositing films of varying thicknesses and shapes. The furnace has a capacity of 600 kW, with a maximum operating temperature of 1,500°C. It offers excellent resistance to thermal shock and high temperature environment. The temperature can be regulated with a range of 0-1,500°C. A 600 is constructed with a robust, thermally insulated steel base, a combination of top-mounted and double wall chamber construction, an energy saving heat transmission system, and a powerful solid-state electronic controller. The integrated control system provides user-friendly features such as a simple two-button start/stop keypad, pre-programmed parameters for seamless and easy operations, over-temperature safety limits, and temperature ramp/soak capabilities. ASM A 600 also offers a wide range of accessories, such as multiple substrate holders, single/multiple substrate drive, auto-feeders, and cool-down techniques. The wide range of substrate holders and substrates allows for a variety of substrates to be processed under different temperature settings. In addition, the integrated auto-feeders allow for the safe and efficient loading and unloading of the substrates. The furnace is also equipped with cool-down techniques, such as gas and liquid cooling, to provide a rapid transition from high processing temperatures to a lower temperature conducive to handling the substrates. A 600 diffusion furnace also includes specialized fast shut-down systems that in the event of any emergency stops all operations immediately and brings the furnace to a safe temperature. The furnace also offers easy maintenance and servicing, with a built-in set of functions that are designed to ensure the highest levels of accuracy, stability, and reliability for consistent thin-film deposition. Overall, ASM A 600 is a highly powerful and reliable diffusion furnace with a wide range of accessories that allows for efficient and accurate thin-film deposition. It is the perfect solution for applications requiring repeatable, high-quality thin films.
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