Used ASM A400 HT #9266026 for sale
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ID: 9266026
Vintage: 1998
LPCVD System
Process: Oxide / Poly
Dual reactors / Dual boats
Boat rotation: Poly
(5) Temperature zones
1998 vintage.
ASM A400 HT (High Temperature) is an advanced diffusion furnace and accessory that is used for applications such as manufacturing optoelectronics, MEMS, nanotechnology, and photovoltaics. This type of furnace utilizes a powerful quartz tube for high-temperature heating up to 1300°C, and is designed for maximum temperature homogeneity across all sample batches. A400 HT also features an active temperature control system that allows for precise and repeatable temperature programming. Its atmosphere control system includes a low outgas design that maintains high purity gas flow, and is optimal for high-temperature brazing and sintering or reactive atmospheres. ASM A400 HT utilizes an infrared pyrometer for fast and reliable temperature measurement, and includes optional full automation capabilities with a customized PC workstation. It also features a specially designed wall insulation that reduces energy consumption, while its sweeping non-immersion heating elements provide an efficient and uniform and even heating power output. The design also helps to reduce particle contamination from gas flow turbulence. A400 HT's advanced active temperature control system offers a variety of features including the ability to program up to twelve segments and four different temperature rising schemes. This allows for precise and repeatable temperature programming of complex temperature profiles. In addition, a quick-release door latch provides convenience and safety when loading or unloading samples. Its low outgas design also ensures optimal flows of gases at high temperatures, providing repeatable and reliable processes in a variety of atmospheres. ASM A400 HT is ideal for a range of research and development applications that depend on high-temperature and uniform diffusion processes, such as optoelectronics, MEMS, nanotechnology, and photovoltaic cells. It offers reliable, repeatable processes with maximum temperature homogeneity across all sample batches, and features extensive automation capabilities that allow for precise temperature programming and control.
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