Used ASM A 412 #9224750 for sale
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ID: 9224750
Wafer Size: 12"
Vertical atmospheric furnace, 12"
Process: ATMOXANNL
Safety specification: SEMI S2-0703/CE
Heater model heating element: ATM FR
Process condition: AP
Process temperature: (C)
ART control: None
N2 load lock: Yes
Wafer type: 12" Si SEMI STD-Notch
Qty of production wafers: 150
Boat operation: 2 boat type
Temperature controller: MTC
UPS: None
System, factory automation
Host communications comply with GJG
Equipment host I/F connection power box top HSMS (10Base-T)
Group controller connection: None
OHT capability: Yes
AGV capability: None
RGV capability: None
PGV capability: None
PIO I/F location: FNC top
Carrier ID reader writer type: RF
CIDRW load port read
CIDRW FIMS write
CIDRW Make / Model: Asyst / ATR9100
System, user interface
Signal tower model: LOUGWB-24-4
Signal tower colors (from the Top): Red / Yellow / Green / Blue
Signal tower location: Front operation panel
Front operation panel: Yes
MMI and gas flow chart gas box & front operation panel installed
Indicator type: Superset
Pressure display unit: MPa / Pa
Exhaust pressure display unit: Pa
Warning label English
System, Furnace
Dewpoint Meter for N2 Load Lock: Yes
RCU duct length FNC - RCU NA
Ionizer:None
Acid chemical pre-filter (for acid): None
Alkali chemical pre-filter (for alkali): None
Hydrocarb chemical pre-filter (for hydrocarbon): None
Side FFU chemical filter side FFU chemical filter: None
O2 control for N2 LL O2 Density control for N2 load lock: Yes
System, wafer / carrier handling
Carrier type FOUP / 25 slots, SEMI STD
FOUP make / model: Entegris / F300-2005-17UT1502
Carrier stage capacity: 32 FOUP
Info pad A,B: None
Fork material: END EFFECTOR242*2 CERMATIC
W/T type: Gemark WHR
W/T type: A/T standard
System, power distribution
Voltage 3 phase 480 VAC
3 phase connection type, Star connection
Voltage single-phase 120 VAC
Wattmeter: None
System, gas distribution
IGS type integrated gas system
IGS make Fujikin
Tubing bends less than 90deg
IGS final filter PALL
IGS regulator Tescom
IGS MFC HORIBA STEC-Z500 series / Digital
IGS press. transducer celerity
Liquid source vapor system: None
Gas leak detector - house system
Detected Gas 1 / Location H2 / Gas cabinet
Detected Gas 2 / Location NH3 / Gas cabinet
Detected Gas 3 / Location H2 / BUBBLER cabinet
Detected Gas 4 / Location HCL / BUBBLER cabinet
Detected Gas 5 / Location NH3 / BUBBLER cabinet
Detected Gas 6 / Location HCL / Reactor cabinet
Detected Gas 7 / Location NH3 / Fast ramp
External torch unit installed
PAC: None
Tape interface heater
Quartz vendor requirement: None
Process tube (AP, AP+Sub-AP): Quartz single
Inner T/C process tube interior: Wall type (for AP Heater)
Tube sealing N2 purge + Lip seal
Boat type: 170 slots Ladder (5.3mm pitch)
Boat material: Quartz
Boat rotation: Yes
Pedestal type: Quartz
Cap heater: None
Auto shutter: No storage purge type
Earthquake countermeasure: None
Process cap
System, facilities
Exhaust connection point: Top connection
PCW connection point: Bottom connection
Incoming gas connection point: Bottom connection
Gas VENT connection point: Bottom connection
Exhaust VENT connection point: Bottom connection
Gas Unit Exh connection point: Bottom connection
Power cable input location: Power box top
Gas exhaust connection: Point top connection.
ASM A 412 is a diffusion furnace and accessories designed and manufactured by ASM International, a leading provider of materials engineering products, services, and technologies. This diffusion furnace is designed for silicon diffusion and comprises a thermal processing equipment, a fill chamber, and a source chamber. The thermal processing system includes a set of aluminum oxide heating elements, a heat transport fluid unit, and an automatic temperature control machine. These components are designed to make sure the furnace operates at a set temperature consistently and reliably. The fill chamber is a sealed chamber that houses and transports the source material needed to create diffusion for the substrate. The chamber is connected to a gas supply as well as a vacuum station to ensure a safe environment for the substrates. The source chamber is where the diffusion reaction takes place, and it too is connected to a gas supply and evacuation tool. ASM A412 also includes a number of safety features including an explosion proof construction, a safety switch to ensure shutoff in the event of an emergency, an exhaust port to vent away any harmful fumes, and an oxygen analyzer to ensure adequate oxygen levels for the safety of the operator. Additionally, the furnace features a dew point temperature monitor and a temperature calculator to help the operator control and monitor the furnace temperature accurately. The features, design, and construction of A 412 diffusion furnace make it an ideal choice for silicon diffusion. Its robust safety features and reliable temperature control make it a reliable and dependable choice for effective diffusion of silicon wafers. The connective vacuum and gas systems, along with the temperature control and analytic capabilities help to ensure the safety and accuracy of the diffusion process. The high-quality built ensures the longevity of the furnace and its operational effectiveness for many years.
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