Used ASM A600 UHV-CP #9239214 for sale

ASM A600 UHV-CP is a advanced high vacuum diffusion furnace and accessory designed for a wide range of achievements in the processing of semiconductor substrates. A600 UHV-CP utilizes a single-zone cold wall heated turbo pump, aninduction-heated hot wall turbo pump, and a patented dual-zone quench chamber to provide outstanding performance for high vacuum diffusion. The cold wall turbo pump reduces the vacuum pressure in the batch chamber to less than 0.001 Torr with a flow rate up to 20 liters/minute. The hot wall turbo pump, with its integrated induction heating element, efficiently sweeps the batch chamber of particulates and dopants at low pressures. With the two-zone quench chamber, it is possible to rapidly quench samples during the diffusion process. ASM A600 UHV-CP offers a wide range of process control parameters, which can be adjusted to meet customers' need for temperature ramping, sample cooling and controlling diffusion atmosphere. The system also includes a remote machine interface for monitoring and controlling the diffusion process over the local network, and a data acquisition system for collecting and displaying process data. A600 UHV-CP is an integrated system that offers the high precision, uniformity and repeatability necessary for achieving superior results. The combination of a robust design, advanced features and sophisticated monitoring systems make ASM A600 UHV-CP the ideal choice for users looking for a reliable and efficient high vacuum diffusion furnace and accessories.