Used ASM Advance 300 VT #9206104 for sale
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ID: 9206104
Vertical LPCVD furnace
Process: Oxide
CIM
Hardware configuration:
Main system:
Main body (Carrier stage)
Utility box
Handler system:
Wafer handing robot
Boat elevator
Cassette loader
Configuration:
Safety specification: ASM Standard
System layout type: U/Box type (I)
System hand: LL
N2 Load lock
Heater type: Temp wire
Torch heater
Process gasses:
Process gas 1 / N2 (30SLM)
Process gas 2 / O2 (20SLM)
Process gas 3 / HCL
Process gas 4 / N2O
Process gas 5 / H2O
Gas distribution system:
Basic style: Conventional gas system
Tubing material: Stainless steel
Tubing finish: Electro-polished
Manual & air-operated valve: Nupro
MFC Unit
Wafer / Cassette handling:
SEMI STD-Notch, 8"
Cassette type: Entergris / 704-503T2
Cassette number of wafers: 25
Cassette storage: 16
Fork type / Material
Fork variable pitch
Boat / Pedestal: 2 Boat
(150) Production wafers
Boat rotation not installed
System control:
System controller: IBM 486 OS2
Torch controller: H2O Separate element Pre burner
Signal tower colors: G / A / B
General pressure display unit: Pressure PSI
Cabinet exhaust display unit: H20
ASM Furnace temp controller:
Host communication
Host communication: User host computer
User host computer I/F: SECS I / II (RS232)
Information transfer protocol: GEM
Equipment host I/F connection: U/BOX Top
Group controller: HIA
Facility electrical equipment power input (2 Lines):
Voltage: 208 VAC, 3 Phase
Voltage: 120 VAC, 1 Phase
UPS Input / Output voltage: 120V / 100V
1997 vintage.
ASM Advance 300 VT is a next-generation diffusion furnace designed to provide a reliable, high-precision atmosphere for metal treatments. It is equipped with a wide range of accessories, enabling it to perform a range of processes including hardening, tempering, annealing, coating, and carburizing. The furnace is constructed from heavy-duty stainless steel and has a robust design for longevity and reliability. It is equipped with a separate diffusing chamber to ensure the highest degree of accuracy. Easy-to-use touchscreen controls are also included, allowing for precise temperature and atmosphere control. With an active volume of 100 liters, Advance 300 VT can heat up to 1 350°C (2 460°F) and can be adjusted to any temperature between 25°C (77°F) and 1 350°C (2 460°F). It also features a powerful heating element and water cooling system, ensuring rapid, controlled thermal cycles. In terms of accessories, ASM Advance 300 VT is equipped with many features that can be tailored to your needs. It comes with a range of crucible configurations for crucible treatments, including square and round versions. Also included are switchable oxygen probes, which detect the oxygen concentration in the gas during a run and can be adjusted accordingly. Other optional accessories include a stainless steel filter unit, temperature sensors, a coolant flow meter, multi-column trays for hardening, tempering, and annealing, special pyrometers for the crucible, and a vacuum system for treating non-oxidizing materials. Advance 300 VT is a powerful diffusion furnace valued for its accuracy and performance. With its wide array of accessories, it is an excellent tool for metal treatment. It is perfect for a range of professional and industrial applications, and provides reliable results and long-term performance.
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