Used ASM MIR 3000 #293615954 for sale

ASM MIR 3000 is a diffusion furnace designed for superior performance and advanced control of intricate deposition and processing operations. This furnace provides rapid heating and cooling along with perfectly controlled heating profiles which enable high-end device production with accuracy and repeatability. MIR 3000 has an energy efficient design which utilizes a unique dual chamber equipment that offers full temperature control via a single heater chamber. This dual chamber system is made up of two large annealing zones with a central control chamber that incorporates high accuracy thermal, vacuum and process control. The design helps to ensure homogeneous temperature distributions in all areas within the furnace chamber. ASM MIR 3000 utilizes an advanced two-zone diffusion heating profile, making it possible to regulate both the heating and cooling periods of the deposition process more precisely. As a result, uniform and repeatable film thickness can be achieved across larger surfaces for superior performance. The unit is capable of reaching temperatures up to 3100 °C, allowing for high-temperature applications across a wide range of advanced materials. The furnace is designed with a range of safety features to guarantee maximum user protection. A box shaped insulation design helps reduce heat loss, while an integrated protection machine ensures that the chamber is not opened during operation. The automatic end-of-cycle heat shutoff feature further ensures that the chamber does not overheat. MIR 3000 includes an automatic process control tool, which enables users to quickly and easily program repeatable heating profiles. The intuitive Control Center software allows operators to easily set parameters such as temperature, time, pressure, gas usage, and other process-related information. This software also provides powerful visualization capabilities so users can monitor and manage process related data in real-time. Overall, ASM MIR 3000 is an ideal tool for advanced device production, offering superior performance and precise temperature control. With its advanced heat distribution capabilities, reliable temperature regulation, and intuitive control systems, this diffusion furnace is a powerful tool for producing high-end devices with superior accuracy.