Used ASM MIR 3000 #293639066 for sale

ASM MIR 3000
ID: 293639066
Wafer Size: 12"
Vintage: 2010
CVD Furnace, 12" Chamber 2010 vintage.
ASM MIR 3000 is a diffusion furnace and accessory equipment that offers reliable and cost-effective processing. It is designed to provide a clean environment for diffusion processes. It utilizes high-temperature inert atmosphere that can be used for both low-alloy and non-alloy steel substrate applications, as well as for metallic coatings. MIR 3000 features advanced, high-precision power supplies that are designed to ensure consistent output and uniform temperatures during processing. Its temperature control and accuracy make it easy to adjust to the desired temperature and maintain optimal efficiency. The system also features fast, high-precision computer-controlled sensors that can accurately detect faults, troubleshoot, and report issues for immediate resolution. ASM MIR 3000 is designed for maximum flexibility and ease of use. It offers a wide range of operation modes and advanced control options, including process cycle profiling and alarm setting. It also comes with thermal analysis and monitoring to ensure uniformity of temperatures in different parts of the furnace and accurate temperature tracking. The unit has a powerful cooling machine to ensure rapid and safe stopping after the processing is complete. It also includes a protective rack so that the substrate is safely held during the diffusion process. The furnace is designed with safety in mind, featuring emergency stop functions, electromechanical process interlocks, and a closed-loop tool that monitors the temperature and scavenging process. For additional convenience, MIR 3000 comes complete with a comprehensive range of accessories, including flanges and sensors, thermocouples, fittings, and adapters. Overall, ASM MIR 3000 is an advanced diffusion furnace asset capable of offering high-precision diffusion processing combined with safety and reliability. It is easy to use, affordable, and highly efficient for alloy and non-alloy steel substrates.
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