Used ASM MIR 3000 #9228941 for sale

ASM MIR 3000 is a diffusion furnace and accessory, designed for various processes including oxides and nitrides growth. It is equipped with reliable and economical heating technology, highly accurate temperature control, and advanced gas control systems. MIR 3000 also incorporates a number of safety systems for protecting both workers and the equipment. ASM MIR 3000 features a top-loading hearth, which is designed to provide maximum thermal uniformity to ensure consistent processing results. It also has two independent heating zones capable of heating up to 1500°C, enabling different temperatures to be set in each zone as desired. In terms of temperature control, MIR 3000 offers 20-step programmable heating profiles as well as advanced Rapid Thermal Processing technology that can reach temperature levels up to 1600°C in seconds or minutes with rapid thermal cycles. The furnace also includes advanced gas control systems and multi-layer gas-tight surfaces that help reduce gas permeability and loss due to evaporation. For additional safety, ASM MIR 3000 has several redundant vacuum interlocks, as well as infrared and pyrometer systems to monitor and help prevent human error. MIR 3000 can be combined with a number of materials to form process packages for optimal results. This approach, known as architecture-based process design, allows the operator to fine-tune parameters and customize the process according to the application. ASM MIR 3000 is also compatible with a variety of computer-aided process control (CPC) software programs designed to simplify the operation of the furnace and optimize process results. This includes a wide range of features such as pre-programming, multi-zone control, process monitoring, and data logging. In conclusion, MIR 3000 is a high-quality and versatile diffusion furnace and accessory, designed for a variety of processes. It offers reliable and economical heating technology, precise temperature control, advanced gas control systems, and an architecture-based process design. Its CPC software support can also help minimize user error and maximize efficiency during the diffusion process.