Used ASM MIR 3000 #9235099 for sale

ASM MIR 3000 is a pioneering low-temperature diffusion furnace specifically designed for the production of monocrystalline silicon ingots using the Czochralski (Cz) method. It features an innovative, energy-saving inductive heating system, with fast cooling capability and sophisticated control logic. It is designed to offer superior process stability and performance, and a more uniform product quality. MIR 3000 includes a user-friendly interface, designed for easy setup, operation and maintenance. It also features automatic operation, with in-process monitoring and analysis for consistent, well-defined, reproducible processes. Its four monitoring and process control systems provide detailed statistical process control, ensuring low variation in properties and uniformity of results. ASM MIR 3000 has a maximum operating temperature of up to 2,000°C, and its heating source is a three-phase motor-generator, which enables efficient and uniform heating in the range of 1,800-2,000°C. It also has a wide range of cooling options, from forced-arylation cooling up to 80°C/minute, to water quench cooling, with cooling rates up to 23°C/minute. Its fast cooling capability helps to avoid crystallization and segregation in the ingot. MIR 3000 is equipped with additional supporting equipment, such as quartz heaters, inductor coils, and complete temperature and ampere control systems. Its advanced process control makes it easy to set and adjust key parameters, such as process time, hold time, and heating rate, to ensure a high-quality product. Its software provides detailed process management data and allows multi-step programming and execution. Overall, this makes ASM MIR 3000 an ideal diffusion furnace for producing monocrystalline silicon ingots. Its superior process stability, fast cooling capability and efficient control systems make it a reliable and cost-effective production device. It is suitable for use in research and industrial high-volume production.