Used ASM MIR 3000 #9311068 for sale

ASM MIR 3000 is a diffusion furnace and associated accessories manufactured by ASM International, an American engineering and materials science company. This diffusion furnace is used for the production of advanced semiconductor components, including gate and source/drain regions, contact layers, silicide layers and dopant redistribution. MIR 3000 offers superior reproducibility in a small and economical package. ASM MIR 3000 utilizes a unique furnace structure that allows a small footprint with excellent energy efficiency and optimized throughput. The furnace is equipped with two low-thermal-mass load lock chambers that provide improved temperature uniformity and repeatability throughout the process. MIR 3000's design also allows for faster stabilization times and quicker cycling for greater productivity. ASM MIR 3000 is a diffusion furnace designed for all silicon and III-V applications. It features highly controllable atmospheres for operating temperatures up to 1150°C and up to 6 atmosphere delivery sources for precise environmental control. The furnace has an improved motion and guidance system for controlled infiltration and a larger cross sectional area for increased throughput. Additionally, MIR 3000 offers a variety of optional breathing ports to prevent safety risks. Along with ASM MIR 3000 diffusion furnace, ASM offers a full line of accessories to meet all your production needs. These include specialized thermal management components such as cooling arms, shutter assemblies and insulation systems, as well as process monitoring and supporting software and hardware. These items can help maximize your efficiency, minimize downtime and closely control process parameters. MIR 3000's versatility, superior process control and reasonable size make it a great choice for both test labs and high-volume production facilities. By leveraging its advanced process capabilities, companies are able to achieve improvements in yields, throughput, repeatability and speed. Whether you are looking for a diffusion furnace for small-scale or large-scale processes, ASM MIR 3000 is a great choice for all your semiconductor needs.