Used ASM MIR 3000 #9351346 for sale

ASM MIR 3000
ID: 9351346
Wafer Size: 12"
Vintage: 2013
CVD Furnace, 12" 2013 vintage.
ASM MIR 3000 is a diffusion furnace and accessory equipment designed to provide durable and advanced furnace solutions that can meet the thermal process needs of multiple industries. MIR 3000 system is suitable for a wide variety of applications such as optoelectronic device fabrication, CMP benchmarking, advanced device packaging, thin film deposition, and epitaxial growth. The diffusion furnace and associated accessories come with a fully automated process controller that ensures that each manufacturing process is kept on track. The process controller is capable of controlling up to four independent processes with up to eight variables, making it a versatile tool for multiple industrial applications. The unit is powered by a high capacity and reliable electrical machine, and comes with a wide range of safety features such as over-temperature protection, over-pressure relief valves, and power fail safety. In addition, the furnace and accompanying accessory tool meet the most challenging industry safety approvals, such as UL, CSA, and NFPA 79. ASM MIR 3000 asset features advanced thermal process control options, a sophisticated control software package, and a flat-plate design that accelerates the diffusion of thermal energy throughout the chamber. Furthermore, the model boasts an advanced thermal layer profiling equipment that guarantees uniform distributions of heat across the entire chamber. The chamber features an easy-to-use continuous belt design for high-throughput operations. The optional digital belt drive system can be used to precisely control belt speed, making sure that temperatures are kept consistent. In addition, the unit comes with advanced chamber cooling technology that eliminates long cooldown times. Overall, MIR 3000 diffusion furnace and accessory machine is a powerful and reliable tool for a multitude of thermal process applications. With its highly advanced process controller, enhanced safety features, and an advanced thermal processing tool, the asset provides users with a robust and reliable thermal process solution.
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