Used ASM MIR 3000 #9358637 for sale

ASM MIR 3000 is a diffusion furnace and associated accessories designed by ASM International for use in semiconductor fabrication processes. The system consists of a single chamber furnace and controller, gas mixer, valves, gas fittings, manifold and piping, thermocouples, and temperature gauge/controller. The main chamber of MIR 3000 is a vertical cylinder made from stainless steel and equipped with a graphite susceptor. The susceptor is designed to hold the wafer during processing and distributes the heat evenly across the surface. The interior of the furnace chamber is also lined with graphite blanket to ensure thermal insulation. The heating elements are located beneath the susceptor and control the temperature of the chamber via PLC (Programmable Logic Controller). The heating elements produce a uniform temperature within the furnace chamber. The gas mixtures are delivered to the chamber via the gas mixer, valves, gas fittings, manifold and piping. The gas flow is regulated by a mass-flow controller, which allows for precise control over the gas composition. The gas mixture is introduced to the chamber through several gas inlets, which are connected to the manifold and piping. Temperature is monitored and controlled using thermocouples and a temperature gauge/controller. The thermocouples are inserted into the chamber and detect the temperature levels throughout the chamber. The temperature gauge/controller is used to set and adjust the temperature range of the chamber. ASM MIR 3000 is suitable for a wide range of diffusion processes including thermal oxidations, nitriding, oxide deposition, and conductor doping. The system provides precise temperature control, a uniform temperature profile throughout the chamber, and accurate gas mixing for ideal diffusion conditions. The system is easy to program, extremely safe and reliable, and can be used for a wide range of applications.