Used ASM UHV-A600 #9144030 for sale

ASM UHV-A600
ID: 9144030
Wafer Size: 8"
Thermal HSG systems, 8".
ASM UHV-A600 diffusion furnace is designed for high-power, ultra-high vacuum inert gas applications. This furnace is a high-performance, versatile, and reliable tool for developing advanced materials with excellent etching capabilities and precise surface preparation. This diffusion furnace is designed with a high-speed belt-driven hot-zone heater that can provide temperatures up to 1400°C. The hot zone is enclosed by a quartz chamber with M63 screws allowing for convenient access to a guarded post-load environment. This post-load environment helps ensure a consistent and uniform temperature distribution throughout the entire chamber and allows the furnace to achieve excellent uniformity of the diffusion profile. The quartz chamber also serves to prevent contamination from the outside air. The furnace is equipped with a powerful 8.5 kW RF generator and a hot-zone oscillator to ensure uniform heating of the entire body of the furnace. An intuitive touch screen interface guides the operator through set-up and control of the furnace. The control equipment also includes a real-time data logging system and the ability to export data to a computer for analysis. UHV-A600 diffusion furnace also features advanced inert gas control systems. The furnace can be configured to use argon, nitrogen, or other reactive gases for a number of process applications. This includes regulating flow rates, pressure, and flow control of the heated gas to ensure uniform diffusion of the target material. The user can also adjust the furnace temperature profile to their desired parameters within a few minutes. ASM UHV-A600 diffusion furnace also features a range of accessories to maximize its efficiency and flexibility. These include: a gas distribution manifold, a recirculating pump, a 5-port valve and filter, an air gauge, and a vent unit. The gas manifold ensures a uniform supply of gas to the furnace and is powered by a powerful motor to support high-power applications. The recirculating pump circulates gas within the furnace to provide uniform temperature distribution in the hot-zone. Finally, the vent machine helps evacuate gases from the hot zone and help maintain a high level of cleanliness within the furnace. This top-of the-line diffusion furnace provides users with a superior level of performance and reliability and is an ideal solution for a wide range of applications. With its advanced heating capabilities and inert gas control systems, UHV-A600 diffusion furnace is the perfect solution for meeting the demands of advanced manufacturing processes.
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