Used ASYST / PST Melitas F303VD #9375207 for sale

ASYST / PST Melitas F303VD
ID: 9375207
Furnace.
ASYST / PST Melitas F303VD is a diffusion furnace and package of accessories designed to facilitate rapid heating and conversion processes of substrate components for semiconductor device fabrication. It provides advanced control features, allowing accurate monitoring, tuning, and repeatable operation, making it an ideal solution for modern device manufacturing. The furnace consists of a quartz chamber divided into two segments, allowing for diffusion or annealing of alloys at the temperatures required by today's semiconductor manufacturing. It features a heated quartz top plate for uniform heating and smooth surface finish, as well as a large side chamber for optimized temperature profile control. The furnace includes a vacuum system through with an integrated turbo pump. The system can achieve temperatures up to 1000°C and maintain process times up to 30 minutes. PST Melitas F303VD comes with a package of accessories designed to improve process efficiency, such as a barometric chamber for controlling the background pressure, as well as transition pieces, thermal fuses, and a PCM7 Process Controller for measuring and controlling substrate temperature and pressure. The Process Controller supports multiple process recipes, allowing operators to store up to 100 parameters with setpoints, enabling quick precision process adjustments as necessary. It features a two-line alphanumeric LCD with elastomeric keypad for easy programming and a socketed hardware for quick replacement. ASYST Melitas F303VD is designed to increase efficiency and usability in the semiconductor device fabrication process. It is equipped with advanced control features to streamline operations and enable rapid processing, making it an ideal solution for modern manufacturing processes.
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