Used ASYST / PST Melitas F30VH #293668221 for sale

ASYST / PST Melitas F30VH
ID: 293668221
CVD System.
ASYST / PST Melitas F30VH is an advanced diffusion furnace and accessory designed to enable precision wafer, die, and substrate processing. The F30VH utilizes advanced thermocouple and temperature control systems, plus a host of safety features designed to ensure optimal operator safety. PST Melitas F30VH is the ideal solution for diffusion processes of various substrates, including silicon wafers, thin films and dielectrics. The top-of-the-line furnace features a maximum temperature rating of 1300°C, enabling a wide range of diffusion processing needs. The efficiency-minded design also includes 4-zone heating, as well as recirculated cooling, to ensure precise temperature control throughout the process. For ease of use and maintenance, ASYST Melitas F30VH is equipped with intuitive control systems and a remote monitoring/accessibility feature, providing convenient access to the furnace's vital operating information from any remote device. The furnace also includes a patented inert gas delivery feature to pair with the temperature cycle, allowing for optimized, process-based start-up and shut-down procedures. Melitas F30VH includes a temperature controller with comprehensive safety features to protect personnel and processes during the diffusion process. The integrated thermal management system uses integral feedback loops to finely control temperature, with real-time monitoring to ensure safe, accurate operation. The device also incorporates an automatic cleaning cycle, programmed to automatically clean the inner chamber of the furnace in preparation for subsequent wafer and substrate processes. The cleaning cycle also reduces the risk of contamination, and ensures repeatable and reliable performance. Finally, a hermetically sealed construction helps to protect the device, and ensures safe and reliable operation in a wide range of environments. The device is also highly energy efficient, with a multi-mode power setting to reduce energy consumption and the associated cost. ASYST / PST Melitas F30VH is the ideal diffusion furnace for a variety of applications, as its cutting-edge safety systems, precise temperature control, and comprehensive process monitoring provide a reliable and efficient solution for any wafer, die, or substrate process.
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