Used AXCELIS XT300 #9390658 for sale

AXCELIS XT300
ID: 9390658
Furnace.
AXCELIS XT300 Diffusion Furnace is a reliable and highly advanced piece of furnishing equipment. This model is designed specifically for diffusion and related processes such as oxidation and epitaxial growth. Utilizing a vertical architecture design and inert gas purging equipment, XT300 ensures uniform material heating for optimized production. This model comes with a standard 2"x2" quartz susceptor for the chamber, as well as several optional quartz susceptors, including 4"x4", 4"x6", and 6"x8". Its uniformity of temperature reaches up to +/- 2°C, a superior level of stability for success in semiconductor processing. Plus, the temperature reach is relatable and controllable thanks to its coaxial cooling system and PID controller. Furthermore, AXCELIS XT300 includes a variety of accessories like vacuum preheaters, ceramic baffles for improved material flow, and an optoelectronic unit to allow for loading and unloading versatility. All of these features provide higher throughput while accommodating a variety of wafer sizes. The diffusion furnace is equipped with a powerful programmable clock panel, allowing users to customize time and temperature profile controls for any give multi-step process. There's also a cleanable Prism cassette with a central tab machine provided. This industrial diffusion furnace also boasts a rapid heating tool, with capabilities of reaching temperatures of 1200°C in as little as 12 minutes. Moreover, the automated dosing asset combines with a unique ultra-low nitrogen purge to save energy and maintain precise temperature control. Overall, XT300 Diffusion Furnace is a trusted and dependable model. Its features make it well-suited for difficult high-temperature diffusion processes. With its intuitive CO controllers, uniform temperature settings, low energy consumption and multiple quartz susceptors, AXCELIS XT300 will make any task in regards to diffusion seem effortless.
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