Used BLACKSTONE / NEY MACS-25-US-HIT #9227403 for sale

BLACKSTONE / NEY MACS-25-US-HIT
ID: 9227403
Wafer Size: 8"
Parts cleaners, 8".
BLACKSTONE / NEY MACS-25-US-HIT is a diffusion furnace with integrated heating elements that provide precise and uniform heat distribution. It is composed of a heated chamber, furnace control unit, and accessorie. The heated chamber is designed to hold up to 25 standard-sized carriers. These carriers can be configured for sputtering, PECVD, ion implantation, rapid thermal annealing, and oxidation processes. The furnace control unit allows for precise control of all heating elements. It features four component temperature controllers which offer a combined ±1°C accuracy. The control unit also contains an adaptive predictive controller function that adjusts the temperature profile for better process uniformity. Additionally, the user interface allows for easy parameter setting and monitoring and can log up to 20 separate recipes. The accessorie of NEY MACS-25-US-HIT includes a high-speed turbomolecular pump which is used for creating a high-vacuum environment. This variable-speed pump is capable of achieving a vacuum of up to 10-6 torr. In addition, the system includes a cold trap which captures and stores volatiles to prevent contamination of the heated environment. In order to facilitate easy installation, BLACKSTONE MACS-25-US-HIT is delivered with all necessary components including process controllers, high-speed turbomolecular pump, cold trap, carrier supports, gas lines, and power connections. It is also equipped with a mechanical lifting mechanism for simplified carrier insertion and removal. MACS-25-US-HIT diffusion furnace is a reliable and versatile solution ideal for various applications in the semiconductor industry. Its precise temperature control and uniform heating capabilities make it suitable for complex processes such as sputtering, PECVD, ion implantation, rapid thermal annealing, and oxidation. It also features a high-speed turbomolecular pump and cold trap to create a high-vacuum and contamination-free environment, while its intuitive user interface and convenient accessorie promote an efficient and easy operation.
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