Used BLACKSTONE / NEY MACS-25-US-HIT #9399118 for sale

BLACKSTONE / NEY MACS-25-US-HIT is an advanced high-throughput diffusion furnace and its accessories for semiconductor manufacturing applications. The furnace is integrated with a single-wafer atmospheric pressure chemical vapor deposition (APCVD) chemical delivery equipment and an advanced materials monitoring system which provide consistent, reliable and repeatable process results. NEY MACS-25-US-HIT is a high temperature diffusion furnace capable of achieving full temperature uniformity and tight temperature process control. It is equipped with a 100-wafer batch loading unit and 25°C to 1250°C temperature range. The dynamic process control ensures that nitrogen and oxygen delivery is optimized throughout the entire process. With this machine, diffusion programs can be run in a successive repeatable fashion with minimal cooling time, thus reducing total cycle time. The furnace is also integrated with an APCVD delivery tool. This asset allows for variable process control of chemical reactivity, as well as simplified chemical delivery across the wafer surface. The chemical delivery model is adapted with high-precision sprayer heads, providing uniformity and stability of the deposition process. Additionally, pressure and speed adjustment systems help to ensure stability of the diffusion process. In terms of process monitoring, BLACKSTONE MACS-25-US-HIT is equipped with various process monitors such as temperature, pressure, stress, RF monitoring, and mass flow controllers. These process monitors provide operating data that is used to adjust the temperature and pressure settings during each cycle or between multiple cycles. As a result, process stability and repeatability is enhanced. Finally, MACS-25-US-HIT is also equipped with a comprehensive set of safety features. Pressure actuated shutters are designed to isolate the furnace during maintenance and open-backfill periods, while current-sensitive relays reduce the risk of electrical shock. In addition, high-temperature alarms, fire safety equipment and low pressure switches are all included as a means of protecting users and the environment. BLACKSTONE / NEY MACS-25-US-HIT therefore provides a reliable, highly efficient, and safe process control solution for semiconductor manufacturing applications that require diffusion processing. The combination of high temperature uniformity and tight temperature control, along with advanced monitoring systems and safety features make it an ideal choice for achieving accurate and repeatable process results in a cost- effective manner.