Used BRUCE BDF-41 #9408946 for sale

ID#: 9408946

Manufacturer:

BRUCE

Model:

BDF-41

Equipment Details:

Diffusion furnace
Gases: N2, N2O, NO, O2, H2, SiH4, SiH2Cl2, Nh3, Ph3, 0.2% in SiH4
(2) Tubes: Hydrox
Tube: CVD Poly amorfo
Tube: CVD DCS-HTO
Power supply: 380 V, 315 A, 180 kW, 3 Phase.

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