Used BRUCE / BTU BDF-4 #9245270 for sale
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ID: 9245270
Wafer Size: 6"
Vintage: 1984
Oxidation / Diffusion furnaces, 6"
4-Stacks
Right to left
In-line style source cabinet
Spare parts included
Stainless steel exhaust scavenger
Stainless steel gas manifolds
With regulators
Filters
Manual valves
Gases:
N2 30 SLM UFC 2000
H2 40 SLM UFC 2000
O2 20 SLM UFC 2000
HCL 2 SLM UFC 2000
Ar 30 SLM UFC 1000
O2 5 SLM UFC 1000
Connected load: ~ 96 kVA at 480 VAC
Supply voltage: 440/480 VAC, 60 Hz, 3 Phase
1984 vintage.
BRUCE / BTU BDF-4 is an advanced, automated diffusion furnace designed for operations ranging from research and development to production. Diffusion furnaces are used to create a solid surface with a finishing thickness that is specific to each specific application. BTU BDF-4's particular design and configuration are particularly well-suited to production sequences that require numerous controlled steps of diffusion, heating, cooling, and other processes. BRUCE BDF-4 features a vacuum sealed chamber designed to evenly distribute temperatures up to 2000°C. This distribution allows for an optimal process outcome every time. Additionally, the furnace includes integrated instrumentation to measure multiple process variables, including flow, temperature, and pressure, and provides automatic control functions for repeatable results. BDF-4 was designed to process a range of substrates, including aluminum, stainless steel, and tungsten. In particular, the diffusion furnace has been designed to reduce impurities through the use of vacuum or oxygen atmosphere. Additionally, the furnace is designed to efficiently process ceramic and semiconductor substrates, making it suitable for a variety of applications. BRUCE / BTU BDF-4 also includes a number of customized accessories to accommodate customer production requirements. The furnace features magnetic clamps that allow for easy holding of the substrates in place, improving the uniformity and reliability of the production process. Additionally, the furnace includes safety features such as pass-through doors for breach prevention and double imaging quartz windows for safety viewing. Finally, BTU BDF-4 is powered by the PLC/PC System with GUI Software with 21 CFR Part 11 Compliance. This software is designed to simplify standard processes and automate more complex production sequences. This helps improve production efficiency and repeatability. Additionally, the PLC/PC System has multiple language options to facilitate users in multiple countries. Overall, BRUCE BDF-4 is an advanced, automated diffusion furnace offering process uniformity and control over a range of substrates. Its integrated instrumentation, customizable accessories, and PLC/PC System ensure a comprehensive control over the diffusion process and help improve production efficiency.
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