Used CENTROTHERM E 240 / Euro 2000 #104065 for sale
URL successfully copied!
Tap to zoom
ID: 104065
Wafer Size: 4"
Vintage: 1988
Horizontal diffusion furnace, 4"
Specifications:
Wafer size: 4"
Can be converted to 6" with cantelever loading system, software adjustable
Power: 384kW
ID tubes: 155 to 160 mm
C, D, E, R stacks (16 FUR.)
Temperature range: 400°C to 1200°C
CENTROTHERM controller
Gas cabinet with MFCs, exhaust facility
Soft-landing system for loading and unloading wafer under laminar
Process configuration: (4) stacks x (4) tubes
E stack:
E1: sinter/anneal
Gases: H2 / N2
MFC capacity: 10slm N2, 2slm H2
E2: sinter/anneal
Gases: H2 / N2
MFC capacity: 10slm N2, 2slm H2
E3: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 55slm O2, 10slm H2, 500sccm N2 (source)
E4: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 10slm O2, 10slm H2, 999sccm N2 (source)
F stack:
F1: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source)
F2: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source)
F3: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
F4: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
C stack:
C1: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 1000sccm O2, 999sccm N2 (source)
C2: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 500sccm O2, 999sccm N2 (source)
C3: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 999sccm O2, 999sccm N2 (source)
C4: Al alloy
Gases: O2 / N2
MFC capacity: 999slm N2, 5slm O2, 2slm H2, 500sccm N2 (source)
D stack:
D1: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
D2: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 999sccm O2
D3: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 1slm O2
D4: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 1000sccm O2
Old furnace:
#22: Thick Al alloy
Gases: O2 / N2
Rotameter capacity: 150CD N2, 150CD O2
#23: N-type doping using POCL3
Gases: O2 / N2 / N2(S)
Rotameter capacity: 150CD N2, 150CD O2, 150CD N2 (source)
#24: Gold drive
Gases: O2 / N2
Rotameter capacity: 150CD N2, 150CD O2
Spares inventory:
Furnace:
STC / TCU interconnecting cable
(Qty 5) THERMOWELL oil units
(Qty 2) CU406 SCPB 40 DGT display boards
(Qty 2) Magnetic coupling
EXT grade wire: OMEGA RS-20-100
Thermocouple extension wire, 250'
(Qty 67) Thermocouple connectors: Omega GMP-R/S M
(Qty 80) Thermocouple connectors: Omega GMP-R/S F
(Qty 17) Grounded mini connectors: RS M
(Qty 29) Grounded mini connectors: RS F
(Qty 3) Custom heavy gauge diffusion cartridges: AD-1419
Cartridge
2-pole gold plated contact: SW142G-10-B
2-pole gold plated contact: SW142G-10-M
Set switch gold plated contact: OSWG3-10
TOL-O-MATIC cable cylinder (Aluminum tube): CC 10 SK 70
(Qty 3) Thermocouple panel meters, 230V: Omega DP 41 - TC 230
Thermocouple and fine wire welder: TL-WELD 230VAC
(Qty 4) Reference junction thermostats, VT60: 1018
Paddle belt, 12m
MFCs:
(Qty 4) MFC: COASTAL H2: 10 SLM UFC-1100A
MFC: COASTAL O2: 500 SCCM UFC-1100A
MFC: COASTAL O2: 1 SLM UFC-1100A
(Qty 2) MFC: COASTAL O2: 5 SLM UFC-1100A
(Qty 2) MFC: COASTAL N2: 10 SLM UFC-1100N
(Qty 2) MFC: COASTAL N2: 999 SCCM UFC-1100A
MFC: COASTAL SiH4: 500 SCCM FC-260
MFC: COASTAL NH3: 3 SLM FC-260
(Qty 3) MFC: MYKROLIS O2: 500 SCCM FC-2900V
MFC: MYKROLIS O2: 1000 SCCM FC-2900V
MFC: MYKROLIS N2: 1000 SCCM FC-2900V
(Qty 2) MFC: MYKROLIS H2: 10 SLM FC-2900V
(Qty 2) Cards Lag 03: p/n 001112
Display card: p/n 001022
Card: p/n 001824
Locals:
Teflon coated wire, 2-core: 20m
(Qty 3) FESTO cylinders: p/n DGS-25-50-PPV-A
(Qty 3) FESTO cylinders: 10 bar
(Qty 15) FESTO sensors
(Qty 4) Solenoids
(Qty 6) Batteries, 3.3V
(Qty 400) Miscellaneous ICS: EEPROMS, Digital ICS, reg and microprocessor
Quartzware:
(Qty 7) Tubes, 2,150 mm (161 mm dia) TESLA: DQ4-39
(Qty 6) Tubes, 2,150 mm (155 mm dia) TESLA: DQ4-09
THERMCO tube, 1,840 mm: DQ4-15
(Qty 10) TESLA cross slotted boats: DQ4-20
THERMCO cross slotted boat: DQ4: 01
(Qty 6) Hydrox quartz balloons: DQ4-05
Thermocouple sheath, outer: DQ4-11
(Qty 2) White elephants: DQ4-17
(Qty 3) Inverted boats: 92 slots: DQ4-34B
(Qty 31) Inverted boats: 84 slots: DQ4-34A
(Qty 2) Boat holders: DQ4-18
(Qty 12) Injectors: DQ4-04
(Qty 2) Adaptors: DQ4-08
(Qty 3) Baffles: DQ4-12
(Qty 4) Paddles: DQ4-03
(Qty 3) End caps: DQ4-16
(Qty 10) Discs: DQ4-37
(Qty 3) Push rods: DQ4-09
(Qty 2) Plugs: DQ4-26
(Qty 5) Thermocouple sheaths, inner: DQ4-41
(Qty 3) Quartz ladders: DQ4-32
Thermocouple, p/n 101 4T-720-R-020
Facility requirements:
Electrical: 440VAC, 3-phase, 50/60Hz, 24kW maximum for single furnace
Cold water: 60 PSI, 15°C to 20°C
Air: 40 PSI
O2, H2, N2: 40 PSI
Exhaust
1988 vintage.
CENTROTHERM E 240 / Euro 2000 diffusion furnace provides the highest level of performance with its innovative construction and versatile and reliable operation. This modern diffusion furnace combines the robust and power of a 100 watt heating element with the sensitivity of a temperature sensor to control temperature. Its advanced features include an easy-to-use touch control, a digital display for reading real-time temperature values and a user-friendly software for carrying out daily routines, such as generating process reports, controlling multiple devices and configuring zones separately. E 240 / Euro 2000 diffusion furnace employs dual wall cascades and movable hot zone spots for optimum heat transfer and temperature stability. The resulting uniform heat distribution can be adjusted in various ways, with a range of variable flux elements and hot zone spot configurations. It also features an efficient cooling system for temperature control, advanced vacuum technology for ultimate control over the environment, and high-quality insulation to maximize energy efficiency. The furnace is equipped with three-phase power conversion, adjustable pilot, and an integrated safety switch. It features adjustable uniformity, quickly adjustable hot spots, and an adjustable flow path of the carrier gas. With an adjustable dynamic process window, CENTROTHERM E 240 / Euro 2000 offers tight control of the deposition process. Its integrated motion control platform and load lock allows the user to program and store up to 32 programs of up to 600 steps each. E 240 / Euro 2000 offers a complete range of accessories, such as a sample pre-treatment chamber, programmable automatic small parts feeders, annealing and reconditioning trays, and an array of custom designed tools. These accessories enable users to fully tailor their furnace systems to their specific requirements, allowing for a perfect match between the design and build of the process chamber and its expected function. Finally, CENTROTHERM E 240 / Euro 2000 diffusion furnace is designed for maximum uptime and reliability, allowing users to remain confident in the performance of their furnace. Its robust construction and reinforced cladding help to protect the sensitive working parts, and its low-maintenance construction help to reduce downtime, thus increasing productivity and profitability.
There are no reviews yet