Used CENTROTHERM E 240 #293622222 for sale

CENTROTHERM E 240 is a diffusion furnace and accessory package designed specifically for medium-sized semiconductor fabrication applications. It provides rapid, cost-effective wafer processing with excellent uniformity and particle control. E 240 consists of a temperature-controlled, vertcally-oriented, horizontal furnace chamber mounted on a rigid stainless steel base. The chamber has thermally insulated alloys walls and door. An annular SiC heating element is die-cast into the sidewalls, while a refractory base line ensures high thermal uniformity. The entire chamber is vacuum-sealed, guaranteeing a particle-free environment. The furnace door is electronically linked to the control equipment, ensuring the maximum safety during operation and offering a wide range of control functions. The system also features an electronic self-protection device to guard against thermal runaway, process overshoot and overtemp. The low thermal mass of the chamber walls allows for fast, efficient ramp rates, enabling process times down to 3 minutes for some applications. Precise temperature control enables uniform and repeatable processing, with +/-1degC temperature uniformity at the wafer level.A new, high-efficiency purge unit delivers rapid thermal cycle times and uniformly low oxygen levels. Remarkably low process times and low cost of ownership further justify the purchase of CENTROTHERM E 240. E 240's advanced control machine provides a range of sophisticated control modes, including multiple program steps, single and group runs, regionalized heating and cooling with user-defined dwell times at each step. The clear, intuitive user interface further simplifies operation and provides the peace of mind that comes with knowing the tool is doing exactly what it says. Additionally, CENTROTHERM E 240 comes with a comprehensive range of accessories, such as programmable wafer holder, quartz boats and wafer plates, temperature sensors, pressure taps and exhaust valves. All of these components guarantee and maintain the highest level of overall performance. E 240 is the ideal choice for medium-sized and high-volume semiconductor fabrication processes. It provides fast cycle times, superior temperature control and excellent particle control, all with the ease of operation and low cost of ownership that makes ownership attractive in any production environment.