Used CENTROTHERM E1550 HT 260-4 #9260101 for sale
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ID: 9260101
Wafer Size: 6"
Vintage: 2016
Horizontal furnace, 6"
(4) Stacks
(4) Tubes configuration:
LPCVD LTO-PSG
LPCVD HTO
POCl3 Diffusion
Wet oxidation
Heating element: 100-600°C
Flat length: 600 mm
Diameter: 260 mm
(5) Heating zones
Heating element: 400°C-1050°C
Flat length: 600 mm
Diameter: 260 mm
(5) Heating zones
(2) Heating elements: 600-1300°C
Flat length: 600 mm
Diameter: 260 mm
(5) Heating zones
Furnace cooling system: Integrated gas system for DCS: HTO / TEOS process
(3) Standard cooling systems:
Tube closed cycle water cooling system
CENTROTHERM Machine Interface (CMI)
Graphical user interface
(4) Furnace control systems (Field bus: CAN)
(4) Temperature measurements
(4) REG 97 Temperature controllers
Fuzzy enhanced PID control
(4) Cascade temperature controls
(4) Profiling elements
For (5) zone heating elements: Type R
Security system CMS
Independent for up to (4) tubes
Automatic pressure tightness system for closed tube systems
Scavenger
(2) Tube closures
Closed tube for soft landing system
Vacuum door for soft landing system
(4) Tube loading systems:
For soft landing process boat
Gas system cabinet GVS
With main gas lines for N2, O2, H2, SiH4, SiH2Cl2, PH3, N2O
Gas / Vacuum system: LPCVD: LTO-PSG
Gas lines: N2, SiH4 (Rear), PH3 (10% in Ar) (Front, rear), O2 (Front, rear) without vacuum pump
Gas / Vacuum system: LPCVD: HTO
Gas lines: N2, SiH2Cl2 (front, rear), N2O (front, rear), without vacuum pump
Gas system: POCL3 Diffusion
Gas lines: N2, N2 (POCl3), O2, O2 (High)
Gas system: Wet oxidation (Hydrox - ext. torch, DCE – TransLC)
Gas lines: N2, O2, H2, N2O, N2 (DCE), O2 (DCE)
Laminar flow system:
For vertical flow
Process boat lift
Without storage and controlling computer, 6"
Process boat storage
Storage positions plus one manual loading storage, 6"
Loading port
Process boat transfer system
Flat aligner
Power supply: UPS10
No auxiliary equipment
2016 vintage.
CENTROTHERM E1550 HT 260-4 diffusion furnace is a professional-grade piece of equipment designed for a variety of bulk crystal growth processes. It is ideal for materials which require high temperatures for large-scale growth, such as gallium arsenide, silicon, and nitrides. This four-zone furnace can reach temperatures up to 1300°C, and is designed for either gas delivery or direct contact heating. The central part of the furnace is composed of a chain-driven rotary hearth, which houses the four heating zones. Each of these is independently controllable for precise temperature control across the entire volume of material. The four heating zones can be operated with either gas or electric heating elements as the source of energy. The gas delivery equipment consists of a three-way valve to control the flow of fuel gas into each of the heating zones. Additionally, CENTROTHERM E1550 features an endothermic gas injection system for fast cooling. The furnace includes a two-stage recirculating air unit, which is equipped with separate stack fans for each zone. The fans provide bulk cooling as well as a circulation of hot air for even heating across the entire material volume. Additional safety features such as an in-line emergency stop button, audible and visual alarms, and flame monitoring thermocouples further increase the safety of the machine. E1550 HT 260-4 diffusion furnace also comes with gas and electrical connections, as well as detailed operating instructions. For optimal performance and efficiency, we recommend pairing it with CENTROTHERM matching suite of support accessories, including refractories, piping, and other ancillary equipment. These accessories allow for even more precise control of the furnace's firing parameters, and ensure your work is of the highest quality. In conclusion, CENTROTHERM E1550 HT 260-4 diffusion furnace is an ideal choice for a wide variety of bulk crystal growth processes. Its advanced features and comprehensive safety systems make it the go-to device for any application requiring high temperatures and precise control.
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