Used CENTROTHERM E1550 HT 320-4 #9131102 for sale
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ID: 9131102
Vintage: 2001
Furnace
(4) Stacks
Tube 2: LP-CVD Silicon nitride
Tube 3: POCL3 N Doping
Tube 4: Anneal with steam generator
Tube 1: Not configured
Spare parts:
Heating cassette
(2) Toxic gas cabinets
EBARA AAS 100 WN Dry pump
CENTROTHERM Scrubber unit
Heating element
VAT Controller PL3
Sublimation trap
Nitride manifold
EBARA Pump
Nitride pipework
Main vacuum valve
SCHUMACHER Bubbler
VAT Butterfly valve
VAT Butterfly valve control
(2) Process tube doors
Quartzware
Process tubes
Doors
CENTROTHERM Host controller
Tube main screen
(3) MFC
Water flow meter
Digital 380 UTS8 temperature controller / Monitor
5 V / 24 V PSU
Berghof automation paddle controller
Pneumatic door piston
Various valves
Relays
Bearings
Manuals
2001 vintage.
CENTROTHERM E1550 HT 320-4 is a high-temperature diffusion furnace and accessory from CENTROTHERM. This powerful equipment is designed to provide superior diffusion uniformity and process repeatability in all sorts of semiconductor applications. E1550 HT 320-4 operates with advanced patented atmospheric and temperature control technology to evenly spread heat throughout the chamber during diffusion processes. It has a wide temperature range of up to 1950°C, and a large 4" hot zone, allowing quick and efficient thermal processing of workpieces. In addition, CENTROTHERM E1550 HT 320-4 has a range of accessories that provide additional convenience. These include heat shields, a viewing window, and an ergonomic table-top style furnace base. The heat shields are designed to protect delicate components from thermal shock, while the window allows for visual inspection of the process. The furnace base is designed to ergonomically support the furnace, allowing for stable, safe operation. E1550 HT 320-4 is a state-of-the-art diffusion furnace suitable for a variety of high-temperature diffusion applications. It features a large 4" hot zone, a wide temperature range up to 1950°C, and advanced process uniformity and repeatability. Additionally, it is equipped with a range of accessories to provide improved convenience and protection during operation. Thanks to its advanced technology, reliable performance, and robust design, CENTROTHERM E1550 HT 320-4 is a superior choice for any diffusion process.
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