Used CENTROTHERM E2000 HT 320-4 #293774189 for sale
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ID: 293774189
Wafer Size: 6"
Vintage: 2007
PECVD Systems, 6"
Furnace tubes:
ALOx and PEALD
A-Si PECVD
LPCVD
Thermal and wet oxidation
PECVD Gases: SiH4, NH3, N2, H2, N2O, TMA, O2, PH3/B2H6, Doping gas
A-Si Gases: N2, Ar, SiH4, PH3/B2H6, N2O, O2
LPCVD Gases: N2, SiH4, PH3, B2H6
2007 vintage.
CENTROTHERM E2000 HT 320-4 is a high-temperature diffusion furnace designed for the precise control of thermal processing in semiconductor manufacturing and other industries requiring sophisticated heat treatment processes. This advanced furnace model offers a wide range of features and capabilities to meet the demanding requirements of modern high-tech applications. At the core of E2000 HT 320-4 is its high-temperature capability, with a maximum operating temperature of 1300°C. This allows for the precise annealing, oxidation, and diffusion of various materials, ensuring optimal performance and reliability of semiconductor devices and other electronic components. The furnace is equipped with a robust heating equipment that provides rapid heating and excellent temperature uniformity across the process chamber, minimizing temperature gradients and ensuring consistent results. CENTROTHERM E2000 HT 320-4 features a vertical furnace configuration, allowing for efficient wafer handling and uniform gas flow throughout the process chamber. This design enables high-throughput processing of wafers up to 300mm in diameter, making it suitable for production-scale operations requiring large batch sizes. The furnace is also equipped with advanced gas delivery and control systems, ensuring precise management of process gases for optimized process results. One of the key advantages of E2000 HT 320-4 is its advanced process control capabilities. The furnace is equipped with a state-of-the-art control system that allows for the programming of complex thermal recipes with precise temperature ramping, soaking, and cooling profiles. This level of control enables users to tailor the thermal processing conditions to meet specific requirements, leading to enhanced device performance and yield. In addition to its advanced process control features, CENTROTHERM E2000 HT 320-4 is also equipped with a range of safety and maintenance functionalities to ensure reliable and trouble-free operation. The furnace is designed with multiple safety interlocks, over-temperature protection, and emergency shutdown systems to mitigate risks and prevent thermal runaway events. The unit also includes integrated diagnostics and reporting capabilities for easy monitoring of machine performance and troubleshooting of any issues that may arise. To complement E2000 HT 320-4 diffusion furnace, a range of accessories and options are available to further enhance its capabilities. These include wafer handling systems, gas purification units, advanced process monitoring tools, and software integration for seamless control and data management. The flexibility and scalability of CENTROTHERM E2000 HT 320-4 make it a versatile solution for a wide range of thermal processing applications, from research and development to high-volume production. Overall, E2000 HT 320-4 diffusion furnace is a cutting-edge solution for demanding heat treatment processes in the semiconductor industry and beyond. With its high-temperature capability, advanced process control features, and robust design, this furnace offers superior performance, reliability, and flexibility for achieving precise and repeatable thermal processing results.
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