Used CENTROTHERM VLO 180-H2 #9255736 for sale

ID: 9255736
Vintage: 2000
System 2000 vintage.
CENTROTHERM VLO 180-H2 is a diffusion furnace and accessory from CENTROTHERM VLO family of products. This product is designed for electronics applications and offers high accuracy in temperature control across all levels of the heating and cooling cycle. VLO 180-H2 is optimized for metalorganic vapor phase epitaxial growth processes which are often used in microelectronics and optoelectronics industries. Designed with a modular structure, CENTROTHERM VLO 180-H2 consists of a hotwall furnace with a baseplate length of 1800 mm and a DM-210 main controller, which can be operated independently or with up to three additional modules. It offers a wide range of process temperatures from 300°C up to 1300°C with the ability to monitor multiple thermal zones, making it suitable for various applications and processes. The extended length of the hotwall, combined with the self-transportable base and gas distribution chamber, makes it reliable and efficient. VLO 180-H2 is equipped with a CVD performance package, including multi-zone sensor resistors, front/back purge and top/bottom gas valves with stainless steel flowmeters, as well as an optimized thermal profile for reduced stress. The advanced thermal profile consists of four pre-defined temperature stages for ultra-high-quality epitaxy films. It also features an eight-zone heater with 25 watts/cm² dissipated power and dual scrubber combination. The design includes a top-down susceptor lift system for daily maintenance, as well as a variable/adjustable susceptor diameter for optimal homogeneity. CENTROTHERM VLO 180-H2 has a highly accurate temperature control system and is designed with a reliable integration of process parameters, with a graphite susceptor for higher temperature homogeneity, as well as electrical measurements for better control of the thermal cycle. VLO 180-H2's compactness and flexibility make it suitable for a wide range of applications in the electronics industries, with features such as a remote monitoring system for online process diagnostics, and an automatic interface which allows for simplified processes and high-quality results.
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