Used DEGUSSA VKSQ 80-80-120 #9003361 for sale
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ID: 9003361
Vacuum furnace
Operation temp: 150° C
Watercooled: 100° C
Capacitance (internal): 11750 L
Capacitance (doble coat): 540 L
Operating pressure (internal): -1 / +10 bar
Operating pressure (doble coat): +1.5 bar
Pump 1: VAROVAC S400F
Pump 2: RUVAC RA3001
1991 vintage.
DEGUSSA VKSQ 80-80-120 is a highly versatile, three zone diffusion furnace and accessory equipment. It offers precise control over process parameters needed to manufacture innovative materials, such as III-V single crystals and metallized ceramics. The furnace works by introducing reactants, such as silicon source material, into a heated zone and then processing them in an atmosphere controlled by a second and, in some cases, third diffusing zone to create a more complex compound. This tightly designed, cost-effective equipment helps eliminate the use of large amount of energy and expensive vacuum processes, and offers the highest yield available in the industry. Its basic parts consist of the furnace body, tungsten layer bank, air heat exchanger, and flue gas outlet. The tungsten layer bank is the heat energy source, which roasts the material chamber at high temperature while the air heat exchanger preheats the incoming oxygen, nitrogen, or argon before they are pushed to the material chamber. The flue gas outlet then utilizes a series of secondary burners and other controlling materials to exhaust heat energy from the chamber. Other components of the VKSQ include the main heating chamber, insulation liner, temperature measurement system, and automatic temperature control unit. The main chamber features large volume and multiple heating zones that promote enhanced diffusion. Silicon sources are securely introduced into the chamber through a high temperature-resistant valve. The insulation liner provides a protective layer that insulates the chamber, and the temperature measurement machine is equipped with highly sensitive temperature sensors that track temperatures in real time. Finally, an advanced temperature control tool automatically adjusts temperature according to the user's pre-set specifications. DEGUSSA VKSQ is designed to provide excellent results, with temperature stability and process flexibility that aid in major cost savings and reduced wastage of material. It is a highly reliable and durable equipment, designed to withstand high-temperature heat for long-term usage.
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