Used DIFF IFB-ZWT03A #9292381 for sale

DIFF IFB-ZWT03A
ID: 9292381
Furnaces Interface board D4EX40194.
DIFF IFB-ZWT03A is a diffusion furnace and accessories designed to provide cost-effective, high-quality microelectronic component fabrication. The equipment is based on a single-wafer diffusion furnace with three horizontal hot zone heating elements and six Boron Nitride (BN) crucible components. The furnace has an adjustable feedrate of up to 30 grams per minute. It offers 0.03°C uniformity of temperatures in each zone and 0.004°C accuracy in all temperature ranges. The BN crucible components feature a temperature-stable, hydrothermal-resistant design, capable of withstanding up to 1,500°C. Additionally, the thermal mass of the furnace is designed to be low to allow fast start-up, shut-down and temperature ramping. IFB-ZWT03A also utilizes a cutting-edge, closed-loop temperature controller which ensures precise and stable temperature control. High-power tri-zone heating elements are designed to optimize uniformity in the heating zones for oxidation, dopant/impurity diffusion and annealing of microelectronic components. The process tube is designed to provide versatility during operation, with a low thermal mass to ensure fast and constant heating rates and minimal temperature variation. The system is also equipped with a high-efficiency rotary mass spectrometer (RMS) which is designed to provide fast, reliable and accurate mass spectrometry results in a single-shot operation. DIFF IFB-ZWT03A can be fully integrated with automated handling systems and is compatible with all popular CMOS, BiCMOS, DRAM, circuits, and other component technologies. The design of IFB-ZWT03A ensures maximum operating and maintenance efficiency with minimal environmental impact. The unit is configured to reduce energy consumption, noise, vibration and emissions. Safety features such as pressure relief valves, pressure switches, emergency shut-off and pressure gauges are also included for a safe and secure operational environment. Additionally, process control monitors like remote on-site monitoring systems, process alarms, and data logging capabilities provide confidence and assurance to users during calibration and operation. Overall, DIFF IFB-ZWT03A is a top-of-the-line diffusion furnace and accessory machine, designed to provide maximum performance, flexibly and safety. It is capable of precise and powerful processing operations to enable complex and advanced microelectronic component fabrication. This tool is the ideal choice for users seeking high-quality results, superior reliability, and full-service support.
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