Used ESPEC PHC-111M #9352229 for sale

ESPEC PHC-111M is a diffusion furnace designed for processing large-scale semiconductor wafers. Equipped with a high temperature performance (HTP) membrane, it is an ideal tool for large-scale integration (LSI) substrate processing and high-temperature annealing applications. With a temperature range of 100 to 1100 °C, PHC-111M is capable of precisely controlling and maintaining temperatures within a range of 0.1 °C across a variety of semiconductor materials. Its heating element, a 5,000 watt high-efficiency filament, is able to supply both high and low temperatures for accurate patterning. To keep a constant temperature distribution, ESPEC PHC-111M is equipped with an exhaust fan that helps circulate heat evenly throughout the heating chamber. With a 45-liter capacity, PHC-111M can process up to 8-inch semiconductor wafers or substrates using mass production technology. In addition, its ceramic inner chamber ensures minimal oxidation and contamination during processing. The unit is also designed to accommodate various devices including quartz and graphite boats, gas tablets, and thin-film monitoring devices. To further enhance accuracy and repeatability, ESPEC PHC-111M comes with an embedded microcomputer controller with the ability to monitor the heating chamber temperature, heater output, and set parameters. The controller has a focus on demonstrating uniformity, precision, and reliability and includes features such as PID control, temperature measurement, strip chart, self-diagnosis, and time alarm functions. In terms of safety, PHC-111M also features an earthquake detector, open circuit and short circuit protections, and an interlock system that prevents the furnace from being opened while it is running. The unit also uses a time-sharing system wherein multiple programs can be programmed and executed simultaneously, allowing for uniformity and reliability during mass production applications. Finally, ESPEC PHC-111M is equipped with a range of accessories, including a quartz observation window, highly-responsive pyrometer, thermocouple, power cable, PC connector, and thermocouple data logger. It also offers an external graphite heater module for increased process accuracy and flexibility.