Used FLEXTRONICS DS-300 #9076765 for sale
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ID: 9076765
Furnaces
Capacity: 1200 / hour
Fragmentation rate: 0.3%
Temperature zone accuracy : ± 0.5 ℃ / 1100mm
Temperature stability : 0.4 ℃.
FLEXTRONICS DS-300 is a diffusion furnace and accessory equipment designed for use in semiconductor, MEMS, and other related industries. It offers a high-precision thermal solution for a wide range of applications, including annealing, oxidation, and diffusion. The system features a stainless steel chamber, a sheath style heater, and a ceramic insulation package for higher temperature and uniformity control. The chamber is equipped with two independent thermopiles, allowing for precise temperature control of the ambient environment and the material samples. The heating elements are designed for regular and continual operation, and they can be operated manually or remotely by a computer. The unit has a high-efficiency water cooling machine for rapid cooling and protection from overheating. DS-300 is equipped with temperature control and measurement devices for maintaining uniformity of both the process temperature and the environment temperature. The temperature range of the tool is from ambient to 900°C, with an accuracy of ±1°C and a stability of ±0.2°C. The asset also has an inbuilt gas purification model to ensure the quality of the process gases for high purity diffusion processes. In addition, the equipment offers a variety of accessories including a programmable time controller, a data acquisition system, auto-fill gas control, and a vacuum controller for operation in the low pressure range. FLEXTRONICS DS-300 is capable of performing up to 16 different diffusion processes, including oxidation, nitridation, and rapid thermal annealing. It is also equipped with a special process gas unit, which is compatible with both inert and reactive gases. The machine offers a number of advantages, such as real-time feedback control and data logging capabilities, which guarantee accurate and consistent results. Moreover, the uniformity of both the thermal conditions and the process environment are maintained due to the use of advanced technologies, allowing for the fabrication of high-quality materials in a short amount of time. In sum, DS-300 is an efficient diffusion furnace and accessory tool, designed to meet the requirements of modern electronic and semiconductor device fabrication. It features a highly precise and uniform thermal management asset, temperature control and measurement devices, a gas purification model, and a variety of accessories. All of these features make it an ideal choice for both regular and continuous material processing for a variety of applications in the electronics and semiconductor industries.
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