Used GT SOLAR 513349 #9236074 for sale

GT SOLAR 513349 is a diffusion furnace and associated accessory suite that is used to form semiconductor membranes, bond wafers and create metallization layers. As the latest in a series of products in GT SOLAR 51334x diffusions series, 513349 provides an improved set of features compared to its predecessors. GT SOLAR 513349 offers a working area of no less than 2,500mm2 and a max substrate size of 125mm, allowing larger-scale processes to be run without the need for additional fixtures. Supporting temperatures up to 1150°C, 513349 is capable of PECVD, PVD, ALD and other advanced techniques. The furnace can be used with either a nitrogen, argon, hydrogen, or helium atmosphere, or any combination thereof. The energy/oxide ratio is adjustable in 5 increments from 500:1 to 2500:1 for full control over cell level modulation. A choice of 10 different power distributions can be set, with up to 5 external RF sources available. GT SOLAR 513349 also features an ISO class 5 clean room, which ensures the process area remains free from outside contaminants. There is also an integrated secondary vacuum of 1 mT with a resolution of 1 x 10-6 mbar, as well as a baseplate temperature adjustable from 25°C up to 200°C. In terms of added safety, 513349 comes with multiple emergency shut off systems, including power cutoffs via inspection window, furnace interruption, temperature limiter, and thermal shock protection. The model also includes a 2.5 cm thick Alumina plate for easy cleaning and maintenance, as well as a gas cassette with individual gas inlets, outlet, and reservoirs for both nitrogen and argon. Overall, GT SOLAR 513349 is a versatile specialized diffusion furnace and accessory package designed for industry-grade processes across a range of semiconductor and metallization layers. It's not only proven to be reliable and accurate, but also offers an array of safety measures, making it the preferred choice for many processing professionals.