Used HITACHI / KOKUSAI DD-1223V #9190226 for sale
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ID: 9190226
Wafer Size: 12"
Vintage: 2001
Furnace, 12"
Process: Pyro
(100) Process wafers
Process type: Oxide
Gas supply: Bottom
PCW Supply: Bottom
Boat operation: 1Boat
Load lock: No
(25) Carrier slots
System control:
Main controller: CX3002C
Touch screen operation
Gas flow chart (Front, Rear)
Temperature controller: CQ1600
Pressure control: EPV100-AW
Controller power: Ø1 208V 150A
Heater power: Ø3 208V 350A
Oxygen analyzer: No
Tape heater controller: SR Mini
Torch
Process gases:
Process gas 1: N2
Process gas 2: N2
Process gas 3: O2
Process gas 4: O2
Process gas 5: H2
Process gas 6: Hcl
Process gas 7: N2
Process gas 8: N2
Gas distribution system:
Basic style: FUJIKIN IGS
Tubing material: SUS-316L
Tubing finish: VCR
Manual valve: FUJIKIN
Air operated valve: FUJIKIN
Regulator: AP Tech
MFC (Maker. Model): AERA
GAS Detector
Exhaust distribution system:
Air operated valve type
APC EPV-100
Baratron gauge
Main valve
Cold trap
Pump line
Wafer / Cassette handling:
Wafer alignment: No
(16) Cassette storage
Cassette in/out port
Cassette handling robot
Wafer transfer type: 1+4
Fork material: Ceramic
(5) Forks
Fork variable pitch
Fork wafer presence sensor
Elevator handling:
Boat elevator
Auto shutter
Boat rotation
Mechanical parts
Heating chamber:
D4EX16975-1 Heater
TC Type: No
Spike T/C
Overtemp protect T/C
Door interlock
Exhaust System:
Heater exhaust
Gas box exhaust
Process exhaust
ETC:
Handy terminal
Maintenance zig: No
Operation manual: No
Electrical manual: No
Mechanical manual: No
Boat cap ass'y: No
Manifold ass'y
Cap base ass'y
Tube setting part ass'y
Missing parts:
Scavenser EXH MS3 Sensor
Torch TC
Currently warehoused
2001 vintage.
HITACHI / KOKUSAI DD-1223V is a versatile diffusion furnace equipment that can be used for a range of applications, including semiconductor and solar cell manufacturing, thin film deposition, and other process furnace applications. HITACHI DD-1223V features an insulated quartz tube and a maximum furnace temperature of 1,200°C. The furnace can be installed in both vertical and horizontal configurations and includes an in-chamber gas system for adjusting oxygen and nitrogen balance levels. KOKUSAI DD-1223V comes with a set of accessories designed to support various process requirements. These accessories include a quartz liner tube for reducing contamination, a collection plate for collecting exhausts, an anode ring for preventing arcing, and a crucible heater for controlling the temperature of the substrate. Additionally, the furnace includes a variety of safety features such as a gas monitoring unit, combustible gas filters, safety shut-offs, and an automatic shut-off when the temperature exceeds pre-set limits. DD-1223V features an easy to use touchscreen interface and a wide range of pre-programmed recipes for different processes. The furnace is programmed via a Windows-compatible PC and can be remotely operated via a network connection. Additionally, the furnace includes an RS232 interface for connecting to external systems to allow users to access additional control and monitoring functions. HITACHI / KOKUSAI DD-1223V is designed to be durable and reliable, as well as energy efficient. The furnace is constructed from sturdy aluminum and includes a dual-insulated quartz tube to reduce heat loss whileproducing consistent temperatures throughout. The furnace also includes a water-cooled machine that circulates coolant through the power and control circuits to ensure safe operation and cooling efficiency. HITACHI DD-1223V diffusion furnace & accessories is an easy to use, versatile tool which is compact, space-saving and suitable for a range of cleanroom and industrial applications. It offers reliable operation, extensive process control features, advanced safety features, and easy maintenance. With its intuitive touchscreen interface, comprehensive accessories package, and wide selection of pre-programmed recipes, KOKUSAI DD-1223V is a great choice for any user.
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