Used HITACHI / KOKUSAI DD-802V-H #293608646 for sale

HITACHI / KOKUSAI DD-802V-H diffusion furnace and accessories are a highly versatile and reliable equipment for thermal processing of semiconductor devices. This system features high-temperature, high-pressure processing, with the ability to process up to 1500°C for a variety of applications. The unit includes a diffusion furnace, with internal heating elements, as well as flexibility for heated gas and chamber pressure control. The diffusion furnace has a 9" inner diameter, with a single-height chamber, allowing for a maximum workpiece size of 8" x 8". The main chamber is heated by two (2) directionally adjustable molybdenum disilicide (MoSi2) heating elements, with an accuracy of ±1ºC. This machine also offers two (2) directional adjustable secondary heating elements, each heating to a maximum temperature of 1000°C, with an accuracy of ±3ºC. For added accuracy, HITACHI DD-802V-H also offers a cooling tool, which can reduce temperatures inside the chamber to as low as 10°C below its initial temperature. KOKUSAI DD-802V-H asset also allows for a variety of atmospheres in the chamber. Nitrogen and inert gases can be introduced via a side wall inlet, with a flow rate of up to 10 liters per minute. An additional port for external gas circulation allows for the control of more aggressive atmospheres, such as oxidation atmospheres. In addition to gas flow control, the model is also capable of controlling the chamber pressure, with two inlet ports and one exhaust port, all with adjustable pressure settings. In order to ensure optimal processing conditions and safety, DD-802V-H is equipped with a number of control and monitoring features including an automated equipment for monitoring temperature, pressure, and humidity. The system also features a shut-off unit to immediately shut off power to the chamber in case of an emergency, as well as an advanced pressure relief valve for preventing over-pressurization. HITACHI / KOKUSAI DD-802V-H diffusion furnace and accessories are ideal for use in a variety of applications, from semiconductor processing to photovoltaic device production. This machine provides the highest levels of safety and reliability, due to its automated control and monitoring features, versatile atmospheres, and accurate heating elements. For businesses seeking high-temperature, high-pressure processing for their applications, HITACHI DD-802V-H is the ideal solution.