Used HITACHI / KOKUSAI DD-802V-H #9226000 for sale

HITACHI / KOKUSAI DD-802V-H
ID: 9226000
Wafer Size: 6"
Vintage: 1991
Vertical furnaces, 6" 1991 vintage.
HITACHI / KOKUSAI DD-802V-H is a diffusion furnace and accessory used for semiconductor device fabrication. It is designed to quickly and accurately conduct heat treatments of wafers under high vacuum conditions. HITACHI DD-802V-H features a V-h shaped quartz tube and two compact vertical thermalized type coils. It comes equipped with a gas cooling equipment, hot-wall type stirrer, and a high-speed tilt mechanism. KOKUSAI DD-802V-H is capable of diffusion treatments at temperatures of up to 1000℃ under high vacuum and low pressure. It also has high repeatability due to a high degree of temperature uniformity which is achieved through the use of a high performance thermal couple. This allows for precise control over temperature uniformity, enabling processes like thermal oxidation, impurity activation and fine line pattern creation. DD-802V-H has a quartz tube which has a dual thermal chamber design. This arrangement allows for improved temperature distribution by providing more efficient heat transfer through expansion and distribution of released energy. It also has an autoloader, which simplifies operation and minimizes waiting time when performing large-scale diffusion treatments. Additionally, HITACHI / KOKUSAI DD-802V-H offers a gas control device which allows users to finely adjust the gas flow to suit specific conditions and processes. HITACHI DD-802V-H has excellent operational capacity and is low maintenance. It is powered by a single-phase 208V AC power source. Its other features include a high power manual lift, a tilt mechanism, a gas cooling system, and an adjustable heater and temperature controller. This makes KOKUSAI DD-802V-H a reliable and efficient unit suitable for a variety of applications and processes. In conclusion, DD-802V-H is a diffusion furnace and accessory designed for quick and accurate heat treatments of wafers under high vacuum. It has a quartz tube, autoloader, gas control device, and tilt mechanism for precise temperature control. It is powered by a single-phase 208V power source and is low maintenance. HITACHI / KOKUSAI DD-802V-H is an ideal machine for a range of applications and processes.
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