Used HITACHI / KOKUSAI DD-802V-H #9226001 for sale

HITACHI / KOKUSAI DD-802V-H
ID: 9226001
Wafer Size: 6"
Vintage: 1992
Vertical furnaces, 6" 1992 vintage.
HITACHI / KOKUSAI DD-802V-H is a diffusion furnace and accessory that is designed to be used in many varied applications in the electronics industry. This equipment is used for high-temperature chemical vapor deposition, high-temperature photonic curing, and pre-annealing prior to physical vapor deposition. The diffusion furnace is operated by a microprocessor-controlled, multi-parameter programming system, with an easy to use interface. This unit allows up to thirty-six different process recipes to be stored, so users can quickly and accurately perform different processes, without the need to reprogram each process. The chamber of the HRF-802V-H is constructed of high-temperature resistant, stainless steel with a hot-waltered chamber liner to ensure maximum temperature uniformity and flexibility. The vertical lift door allows for easy alignment of the substrate, and the side-opening chamber design provides more uniform temperature control. The temperature range of the furnace is 500 to 1100°C, with a semi-stationary front loader and rear unloading door. The crucible is designed for high-temperature processes and is made with an all-stainless steel construction, including a two-layer graphite insulation machine. The plate-type electric heating element is shielded to keep process media away from the element. The optional all-ceramic paddle allows for control of media transport during processing. An optional gas control tool also provides separate and accurate control of atmospheres during processing. The accessory kit is designed to ensure that users are able to perform processes quickly and accurately, delivering high-quality end products. It includes an insulation and metallization kit, allowing for test isolation and interconnects; a general-purpose fusing mesh kit; and aluminum evaporation boats. Also in the kit is a set of hoses and tubing for interconnecting the chamber and vacuum systems. The electronic features of the HRF-802V-H are designed to provide accurate control and readout of all parameters. The vacuum asset is designed with a multi-stage vacuum pump with a digital readout, and is designed to handle processes up to 10-6 torr. The furnace also has an innovative temperature output model that connects directly to a PC for sophisticated logging and monitoring. HITACHI DD-802V-H is a powerful diffusion furnace and accessory equipment, designed for accuracy and flexibility to meet the varied needs of the electronics industry. This system is capable of producing high-quality results quickly and reliably, and is a perfect choice for many applications in the industry.
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