Used HITACHI / KOKUSAI DD-802V-H #9237189 for sale
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ID: 9237189
Vintage: 1991
Furnace
Process: PYRO
No alarm
Inlet:
Power:
Heater: 1 ¢, 208 V, 142 A
Main: 1 ¢, 120 V, 42 A
Blower: 3 ¢, 208 V, 2 A
Gases:
N2: 1/4 VCR Male
H2: 1/4 VCR Male
O2: 1/4 VCR Male
HCL: 1/4 VCR Male
CDA: 1/4 LOCK Male
Vacuum: 1/4 LOCK Male
VENT: 1/4 VCR Male
Outlet exhaust drain:
PCW: (2) 1B Union male
Exhaust:
Gas box: 150 ¢
Heater: 150 ¢
Process: 40 ¢
Drain: 3/8 LOCK Female
Damaged part: Drain nozzle
1991 vintage.
HITACHI / KOKUSAI DD-802V-H is a state-of-the-art diffusion furnace and accessories tailored to handle the most difficult applications. HITACHI DD-802V-H is constructed from high temperature resistant materials suitable for diffusion processes up to a temperature of 2200°C. This provides faster to and lower energy consumption and eliminates maintenance costs. The furnace has an insulated tungsten filament for controlled temperature uniformity and low uniformity error, as well as a diffusion module with two sets of thermocouples for precise temperature measurement. KOKUSAI DD-802V-H features a three-zone temperature control which helps to produce high quality diffusion across the entire wafer. The heated zones also help to reduce distortion due to thermal stress. DD-802V-H is equipped with advanced pyrometric safety and anti-oxidation features, allowing for longer runs and increased efficiency. The pyrometric equipment consists of four thermocouples, four independent over-temperature sensors, and two pyrometer heads with temperature readouts up to 1650°C. The process gases are circulated throughout the furnace for improved temperature uniformity and uniform doping concentration. Additionally, the furnace has an anti-oxidation system which protects wafers from oxidation damage by adjusting the direction of the conveyor and gas flow during diffusion processes. HITACHI / KOKUSAI DD-802V-H also comes with a patented, semi-closed homogeneous gas unit which minimizes gas leakage and cross contamination. This machine eliminates the need for a manual control tool, resulting in increased efficiency with fewer operational errors. Furthermore, HITACHI DD-802V-H is able to collect process logs, enabling users to track temperature and flow rates during the manufacturing process. Overall, KOKUSAI DD-802V-H is a cutting-edge diffusion furnace, offering users increased efficiency and decreased costs thanks to its advanced safety and anti-oxidation features, coupled with minimized gas leakage and increased temperature uniformity and control. This model provides a powerful and reliable solution for users looking to manufacture some of the most demanding products to the highest quality.
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