Used HITACHI / KOKUSAI DD-812V #9211006 for sale

HITACHI / KOKUSAI DD-812V
ID: 9211006
Wafer Size: 6"
Furnace, 6" Process: PYRO Utility box.
HITACHI / KOKUSAI DD-812V is a diffusion furnace and accessory used for semiconductor device manufacturing. It is a vertical-type furnace equipped with a hot zone with three heating elements: a graphite resistive heater, a quartz halogen lamp, and an infrared ceramic heater. The furnace temperature can reach up to 1000°C and features high thermal uniformity. It has excellent environmental characteristic, making it suitable for semiconductor epitaxial deposition. It features a state-of-the-art three-dimensional gas distribution equipment with dynamic adjustment, allowing for precise and stable gas distribution throughout the process cycle. The system is capable of precise gas flow control, permitting a wide variety of processes. Additionally, the flow rate of the flow-control gas can be adjusted to meet specific deposition conditions. The hot zone is comprised of two parts: upper and lower. The upper part is used to heat the wafer and the lower part is used to control the process atmosphere. The furnace is equipped with a high-end microprocessor controller, allowing for optimum process control and precise temperature control. The easy-to-use controller supports over 50 recipes and allows for 100 simultaneous programming. Moreover, the furnace is accompanied by a wide range of accessories, including a gas panel, a high-efficiency exhaust unit, and a quartz tube heater. The gas panel helps in controlling the input gas flow and provides a precise gas distribution machine. The exhaust tool helps in removing vapors and gases from the asset to maintain a clean working environment. The quartz tube heater helps to keep the temperature of the deposition surface constant. The furnace is designed to provide maximum process efficiency and excellent process control. It features super-high-resolution photography, as well as a reliable security model to prevent unauthorized access. The equipment is supported by a comprehensive service program which provides routine maintenance and support. HITACHI DD-812V is an ideal choice for modern semiconductor device manufacturing. It is engineered to provide precise temperature control and maximum process performance with utmost reliability. Its typical applications include the growth and development of Schottky barriers, ohmic contacts, and epitaxial layers.
There are no reviews yet