Used HITACHI / KOKUSAI DD-853V #293637729 for sale
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ID: 293637729
Wafer Size: 8
Vertical diffusion furnace, 8"
Flat zone flat zone aligner
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CX-3002B Main controller
PCU-3000 / EC-5202 Exhaust controller
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CX-1223 Mecha controller
CX-3202 MFC controller
CQ-1600 Temp controller
DN-150A Gate controller
CX-1317 Torch controller
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(2) Hard Gas Pattern GFC Panels
Lamp torch
UV Sensor torch
SUS-316L Flange
SUS-316L Cooling flange
SUS-316L Seal cap
SUS-304 Cap base
Teflon Teflon cusion
SUS-304 Cool trap
Acrylic trap drain trap
SUS-304 Auto shutter
SUS-304 Scavenger cover
Teflon exhaust line assy exhaust line
SUS-316L EP Reactor gas line set
Mass Flow Controller (MFC)
MFC No / Gas / Full scale / Unit
MFC 1 / N2-1 / 30.000 / SLM
MFC 2 / O2-1 / 20.000 / SLM
MFC 3 / O2-2 / 0.600 / SLM
MFC 4 / H2 / 20.000 / SLM
MFC 5 / HCL / 0.500 / SLM.
HITACHI / KOKUSAI DD-853V is an advanced diffusion furnace and associated accessories for industrial use. It is a compact, vertically arranged furnace with a temperature range of 500-1200°C, and a programmable maximum temperature of 1150°C. This reliable and stable furnace is specially designed for high throughput, low cost and precise thermal processing. HITACHI DD-853V has a graphite furnace liner and ceramic insulated reactant zone. It utilizes a vertical heating structure featuring three evenly spaced high-power output zones. This permits precise distributed temperature control and uniform thermal processing. Its advanced chamber design provides uniform fine distribution of the reactant gas within the ceramic chamber, resulting in high process efficiency. The furnace also has an easy-to-use, high-resolution touch panel monitor and control equipment which displays the current process status, operation parameters and reactant gas flow rate. It also features a reliable, state of the art control system and comes with temperature, process and response control software. This control unit enables accurate process setup and control. In addition, KOKUSAI DD-853V includes automated spool transport and exhaust line solutions to facilitate high-speed up and cycle time reductions. The pre-conditioned material-specific spool transport feature, which can be activated from the control machine, minimizes surplus consumption and ensures consistent process repeatability. The exhaust line solutions also reduce air pollution and dopant loss, whilst saving energy and resources during operation. To further ensure reliable operation and enhanced user safety, DD-853V is equipped with safety valves, gas inlet shut-off, temperature overshoot prevention, and automatic over-pressure release. These safeguards further ensure consistent, repeatable processes and user safety. In conclusion, HITACHI / KOKUSAI DD-853V is a high-quality diffusion furnace and related accessories designed to deliver reliable process repeatability and consistent results. Its advanced chamber design, easily navigable touch panel monitor and control tool, automated spool transport and exhaust line solutions, and sophisticated safety and overpressure release features, make it an invaluable asset for high throughput, low cost, precise thermal processing.
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