Used HITACHI / KOKUSAI DJ-1206VN-CX5 #9233610 for sale
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ID: 9233610
Wafer Size: 12"
Vintage: 2006
System, 12"
Process: Zro
Front body
Main body
Front upper
Heater
Power box
Blower box
GMP Box
Source box
O3 Generator
Killer box
N2 Purifier
IGS Box
Vacuum line
N2 Purge box
Heater exhaust
Damper frame
Main upper
Heater upper
(5) Boxes
(120) Process wafers
I/O Port / SMIF: FOUP
Load Lock: L/L
(25) Carrier slots
Operation screen: Touch screen
Vacuum pressure control: VAT
Controller transformer: 208V, Single phase
Heater transformer: 440V, 3 Phase
Oxygen analyzer: NGK
Module name:
Process gas 1: N2
Process gas 2: He
Process gas 3: Zr
Process gas 4: O2
Gas distribution system:
Basic style: conventional
Tubing material: SUS-316L
Tubing finish: VCR
MFC: STEC
Ozone system: MKS
Manual & air-operated valve: FUJIKIN
Exhaust distribution system:
Air-operated valve type: VCR Connect
Main valve: VAT
Pump line
Cassette In/Out port
Cassette handling robot
(16) Cassette storages
Wafer transfer type: 1 + 4
Fork material: AL2O3
(5) Forks
Fork variable pitch
Fork wafer presence sensor
Elevator handling:
Boat elevator
Auto shutter
Boat rotation
Mechanical parts
Heating chamber:
Heater type: RHC
(5) T/C Types
(5) Spike T/C
Missing parts:
CX5000 System controller
CQ1700 Temperature controller
2006 vintage.
HITACHI / KOKUSAI DJ-1206VN-CX5 is a diffusion furnace and accessories package designed to provide superior quality diffusion processing. It features a computer-controlled touch panel increase/decrease equipment which allows for precise temperature adjustments. The furnace has a frequency of up to 400Hz and a maximum temperature of 1,300 °C. It is also equipped with an edge-coated graphite susceptor which minimizes heat dispersion and allows for a clean and even heating surface. The system comes with a set of two quartz boats for the diffusion process, which are designed for efficient and consistent operation. The boats have an inner diameter of 17.2mm, an outer diameter of 19mm and a maximum capacity of 1ml. It also comes with an electrostatic baffling unit, which minimizes eddy current losses and ensures a consistent temperature. The package includes a water-cooled microprocess control unit, which helps reduce operating temperature and minimize thermal drift. It is also equipped with an efficient cooling machine, which utilizes forced-air cooling agents to maintain a stable operating temperature. Additionally, the diffusion furnace has a maximum active working time of five hours, allowing it to complete the diffusion process quickly and effectively. In addition to the diffusion furnace, the package includes a set of accessories including a quartz tray, a balancing mount and a weight pan, which are all designed to assist the user in setting up and carrying out the diffusion process. An air compressor is also included to provide a steady flow of air to the furnace, improving the efficiency of the diffusion process. HITACHI DJ-1206VN-CX5 package is ideal for all diffusion processing needs. With its precise temperature controls, high-efficiency cooling tool, stable operating temperature and long active working time, it is the perfect choice for any diffusion application.
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